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Robert Kim

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Edits on 14 Dec, 2021
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edited on 14 Dec, 2021
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Patent primary examiner of
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US Patent 7233009 Lithographic projection apparatus and reflector assembly for use therein
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US Patent 7241995 Electron microscope equipped with magnetic microprobe
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US Patent 7247867 Ion implanter and method of manufacturing semiconductor device
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US Patent 7250620 EUV lithography filter
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US Patent 7253419 Apertured plate support mechanism and charged-particle beam instrument equipped therewith
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US Patent 7256396 Sensitive glow discharge ion source for aerosol and gas analysis
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US Patent 7256407 Lithographic projection apparatus and reflector assembly for use therein
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US Patent 7259379 On-axis electron impact ion source
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US Patent 7259380 Scanning mechanism of an ion implanter
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US Patent 7262424 Particle beam therapy system
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US Patent 7265347 Multiple nano-spray delivery system for FAIMS
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US Patent 7265348 Apparatus for dispensing a sample in electrospray mass spectrometers
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US Patent 7265364 Level sensor for lithographic apparatus
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US Patent 7265366 Lithographic apparatus and device manufacturing method
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US Patent 7266270 Waveguide to waveguide monitor
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US Patent 7268347 Ion detecting apparatus and methods
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US Patent 7268357 Immersion lithography apparatus and method
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US Patent 7268358 Method of modulating laser-accelerated protons for radiation therapy
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US Patent 7271396 Method and device for aligning a charged particle beam column
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US Patent 7274433 Objective, optical analyzer, method of driving optical analyzer, and microscope
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US Patent 7276688 Ion-optical phase volume compression
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US Patent 7276693 Inspection method and apparatus using charged particle beam
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US Patent 7276707 Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus
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US Patent 7276715 Method and apparatus for safely handling radioactive sources
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US Patent 7277527 Moveable transparent barrier for x-ray analysis of a pressurized sample
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US Patent 7278299 Method of processing vertical cross-section using atomic force microscope
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US Patent 7279692 Micromechanical infrared source
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US Patent 7282706 Advanced optics for rapidly patterned laser profiles in analytical spectrometry
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US Patent 7282708 Method of selecting ions in an ion storage device
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US Patent 7282725 Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask
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US Patent 7285778 Probe current imaging
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US Patent 7285785 Apparatus with permanent magnetic lenses
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US Patent 7288772 Diagnostic system for profiling micro-beams
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US Patent 7291836 Method and device for continuous determination of lubricating oil consumption of an internal combustion engine
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US Patent 7294831 MALDI sample plate
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US Patent 7295648 Method and apparatus for treatment by ionizing radiation
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US Patent 7297939 Mass spectrometer
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US Patent 7297941 Methods for improved data dependent acquisition
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US Patent 7304313 Low-pressure chamber for scanning electron microscopy in a wet environment
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US Patent 7312444 Atmosperic pressure quadrupole analyzer
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US Patent 7315034 Irradiation system with ion beam/charged particle beam
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US Patent 7317192 High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers
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US Patent 7319222 Mass spectrometer and mass analysis method
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US Patent 7321116 Ionization source for mass spectrometer
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US Patent 7321124 Corrector for correcting first-order chromatic aberrations of the first degree
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US Patent 7323227 Process for precise arrangement of micro-bodies
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US Patent 7323701 Gas discharge lamp
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US Patent 7326923 Programmable molecular manipulating processes
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US Patent 7329868 Charged particle beam apparatus
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US Patent 7329881 Charged-particle beam system
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US Patent 7338249 Sample plate gripping mechanism
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US Patent 7339164 Systems and methods for ion mobility control
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US Patent 7339167 Charged particle beam apparatus
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US Patent 7342241 Method and apparatus for electron-beam lithography
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US Patent 7345275 Mass spectrometric based method for sample identification
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US Patent 7345287 Cooling module for charged particle beam column elements
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US Patent 7348143 Method of visualizing non-targeted metabolomic data generated from fourier transform ion cyclotron resonance mass spectrometers
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US Patent 7348579 Arrangement for performing proton therapy
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US Patent 7348580 Particle beam processing apparatus and materials treatable using the apparatus
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US Patent 7348582 Light source apparatus and exposure apparatus having the same
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US Patent 7348584 Infrared projector
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US Patent 7350404 Scanning type probe microscope and probe moving control method therefor
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US Patent 7351960 Enhanced ion desolvation for an ion mobility spectrometry device
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US Patent 7351961 Measuring cell for ion cyclotron resonance spectrometer
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US Patent 7351963 Multiple rod systems produced by wire erosion
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US Patent 7351965 Rotating excitation field in linear ion processing apparatus
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US Patent 7355171 Method and apparatus for process monitoring and control
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US Patent 7355187 Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate
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US Patent 7358484 Hyperthermal neutral beam source and method of operating
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US Patent 7358491 Method and apparatus for the depth-resolved characterization of a layer of a carrier
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US Patent 7358504 FAIMS apparatus and method for separating ions
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US Patent 7361892 Method to increase low-energy beam current in irradiation system with ion beam
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US Patent 7361898 Scanning electron microscope and CD measurement calibration standard specimen
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US Patent 7361917 Far-infrared generator for thermotherapy and method of far-infrared irradiation
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US Patent 7361941 Calibration standards and methods
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US Patent 7365345 Lithographic apparatus, radiation system and filter system
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US Patent 7365348 Adjusting device of an apparatus for generating a beam of charged particles
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US Patent 7365349 EUV light source collector lifetime improvements
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US Patent 7368733 Contamination barrier and lithographic apparatus comprising same
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US Patent 7368734 Ion beam measuring method and ion implanting apparatus
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US Patent 7368735 Charged beam drawing data creation method, charged beam drawing method, charged beam drawing apparatus and semiconductor device manufacturing method
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US Patent 7368738 Advanced pattern definition for particle-beam exposure
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US Patent 7372026 System for repositioning a microfabricated cantilever
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US Patent 7375330 Charged particle beam equipment
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US Patent 7375344 Ion focussing and conveying device and a method of focussing and conveying ions
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US Patent 7375352 Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope
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US Patent 7378670 Shielding assembly for a semiconductor manufacturing apparatus and method of using the same
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US Patent 7385187 Multi-reflecting time-of-flight mass spectrometer and method of use
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US Patent 7385189 Nanospray ionization device and method
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US Patent 7385673 Immersion lithography with equalized pressure on at least projection optics component and wafer
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US Patent 7399961 High throughput ion source with multiple ion sprayers and ion lenses
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US Patent 7411184 Microfluidic device comprising an electrospray nose
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US Patent 7425702 Charged particle beam apparatus
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US Patent 7626186 Mobile electron beam radiation sterilizing apparatus
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US Patent 7728287 Imaging mass spectrometer with mass tags
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US Patent 7728311 Charged particle radiation therapy
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US Patent 7741614 Lithography system and lithography method using the same
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US Patent 7750314 Elevated temperature RF ion source
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US Patent 7755065 Focused ion beam apparatus
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US Patent 7759663 Self-shading electrodes for debris suppression in an EUV source
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US Patent 7763847 Mass spectrometer
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US Patent 7763851 Particle-beam apparatus with improved wien-type filter
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US Patent 7763852 Scanning electron microscope having time constant measurement capability
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US Patent 7767959 Miniature mass spectrometer for the analysis of chemical and biological solid samples
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US Patent 7767990 Radiation attenuation system for lateral imaging
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US Patent 7771339 Method and system for radiotherapy treatment
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US Patent 7771943 Method for the determination of the position of unsaturation in a compound
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US Patent 7772552 Methods and devices for atom probe mass resolution enhancement
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US Patent 7772566 Power saving type safe drinking water discharge device
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US Patent 7772567 Specimen holding device and charged particle beam device
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US Patent 7777178 Plasma generating apparatus and method using neutral beam
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US Patent 7777183 Charge particle beam system, sample processing method, and semiconductor inspection system
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US Patent 7777196 Cold electron emitter device for display
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US Patent 7786450 Multipole coils
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US Patent 7788732 Method and apparatus for two-dimensional profiling of doping profiles of a material sample with scanning capacitance microscope
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US Patent 7795588 Inspection apparatus
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US Patent 7800062 Method and system for the examination of specimen
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US Patent 7807966 Scanning electron microscope
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US Patent 7812325 Implanting with improved uniformity and angle control on tilted wafers
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US Patent 7812330 Radical cleaning arrangement for a lithographic apparatus
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US Patent 7825388 Charged particle beam irradiation system and charged particle beam extraction method
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US Patent 7838852 Medical radiation apparatus
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US Patent 7842935 Raster frame beam system for electron beam lithography
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US Patent 7847270 Semiconductor manufacturing apparatus and method thereof
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US Patent 7851753 Method and apparatus for reviewing defects
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US Patent 7855357 Apparatus and method for ion calibrant introduction
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US Patent 7855359 Mass spectrometer equipped with MALDI ion source and sample plate for MALDI ion source
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US Patent 7855373 Charged particle gun
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US Patent 7858935 Method and system for conducting event-streamed spectrum imaging
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US Patent 7858936 Slice and view with decoration
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US Patent 7858950 Electrostatic dispersion lenses and ion beam dispersion methods
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US Patent 7868308 Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate
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US Patent 7884317 Base line restoration circuit
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US Patent 7884322 Scanning electron microscope and a method for pattern composite inspection using the same
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US Patent 7888630 Reduced size high frequency quadrupole accelerator for producing a neutralized ion beam of high energy
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US Patent 7888635 Ion funnel ion trap and process
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US Patent 7888652 Ion implantation apparatus
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US Patent 7893400 Method for laser desorption/ionization mass spectrometry, sample supporting substrate used therein, and substrate material testing method
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US Patent 7893407 High performance micro-fabricated electrostatic quadrupole lens
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US Patent 7893414 Apparatus and method for absorption of incident gamma radiation and its conversion to outgoing radiation at less penetrating, lower energies and frequencies
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US Patent 7897916 Tandem ion-trap time-of-flight mass spectrometer
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US Patent 7897917 Methods and apparatus for performing chromatography and mass spectroscopy with supercritical fluid samples
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US Patent 7902497 Method and device for determining the content of lubricating oil in an exhaust gas mixture
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US Patent 7902500 Methods and interfaces for single and multidimensional separations for characterization and/or identification of molecules by mass spectrometry
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US Patent 7902503 Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams
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US Patent 7910878 Method and apparatus for ion axial spatial distribution focusing
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US Patent 7910882 Apparatus and method for cooling ions
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US Patent 7910885 System and method for determining a cross sectional feature of a structural element using a reference structural element
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US Patent 7915581 Methods for sample preparation and observation, charged particle apparatus
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US Patent 7915582 Method for estimation of probe shape in charged particle beam instruments
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US Patent 7921465 Nanotip repair and characterization using field ion microscopy
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US Patent 7923679 Method and device for handling objects
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US Patent 7923681 Collision cell for mass spectrometer
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US Patent 7923685 Electron beam device
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US Patent 7923686 Transmission electron microscope
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US Patent 7923701 Charged particle beam equipment
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US Patent 7923705 Extreme ultra violet light source apparatus
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US Patent 7928371 Methods for penning trap mass spectroscopy
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US Patent 7928373 Isolating ions in quadrupole ion traps for mass spectrometry
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US Patent 7928382 Detector and inspecting apparatus
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US Patent 7928384 Localized static charge distribution precision measurement method and device
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US Patent 7928418 Extreme ultra violet light source apparatus
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US Patent 7932486 Mass spectrometer system
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US Patent 7932491 Quantitative measurement of isotope ratios by time-of-flight mass spectrometry
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US Patent 7935942 Technique for low-temperature ion implantation
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US Patent 7935944 Ion beam irradiating apparatus, and method of producing semiconductor device
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US Patent 7939797 Increasing ionization efficiency in mass spectroscopy
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US Patent 7939809 Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system
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US Patent 7939813 E-beam exposure apparatus
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US Patent 7943902 Method for introducing ions into an ion trap and an ion storage apparatus
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US Patent 7952070 Interlaced Y multipole
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US Patent 7952074 Method and apparatus for inspecting integrated circuit pattern
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US Patent 7952081 Device for determining aim position of charged particle beam, method of using the device, and treatment device employing device for determining aim position
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US Patent 7956321 Method of measuring target object in a sample using mass spectrometry
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US Patent 7956322 Mass spectrometer and mass spectrometric analysis method
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US Patent 7958565 Scan type probe microscope and cantilever drive device
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US Patent 7960690 Automatic gain control (AGC) method for an ion trap and a temporally non-uniform ion beam
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US Patent 7960703 Charged-particle beam lithography apparatus and device manufacturing method
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US Patent 7960706 Shoe sanitizer
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US Patent 7964843 Three-dimensional molecular imaging by infrared laser ablation electrospray ionization mass spectrometry
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US Patent 7964846 Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber
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US Patent 7973278 Microengineered ionisation device
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US Patent 7973283 Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process
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US Patent 7973289 Method for producing image contrast by phase shifting in electron optics
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US Patent 7973290 System and method of beam energy identification for single wafer ion implantation
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US Patent 7973297 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium
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US Patent 7973298 Transport/storage cask for radioactive material
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US Patent 7977626 Time of flight mass spectrometry method and apparatus
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US Patent 7977629 Atmospheric pressure ion source probe for a mass spectrometer
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US Patent 7977631 Method for obtaining images from slices of specimen
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US Patent 7977649 Plasma ion source mass spectrometer
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US Patent 7982179 Beam current calibration system
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US Patent 7982192 Beam processing apparatus
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US Patent 7985948 Systems and methods for analyzing substances using a mass spectrometer
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US Patent 7985949 Detection of analytes using ion mobility spectrometry
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US Patent 7985951 Mass spectrometer
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US Patent 7989760 Extraction detection system and method
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US Patent 7989765 Method and apparatus for trapping ions
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US Patent 7989768 Scanning electron microscope
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US Patent 7989782 Apparatus and method for specimen fabrication
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US Patent 7994472 Laser-driven deflection arrangements and methods involving charged particle beams
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US Patent 7994473 Mass spectrometer with an electrostatic ion trap
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US Patent 7994475 Ion mobility spectrometer comprising two drift chambers
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US Patent 7994476 Apparatus and method for enhancing voltage contrast of a wafer
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US Patent 7994486 Substrate scanner apparatus
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US Patent 7999224 Ion mobility spectrometers
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US Patent 8003935 Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer
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US Patent 8003936 Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer
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US Patent 8003937 Electrospray ion source with reduced analyte electrochemistry
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US Patent 8003956 Method and apparatus for controlling beam current uniformity in an ion implanter
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US Patent 8003957 Ethane implantation with a dilution gas
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US Patent 8003962 Extreme ultraviolet light source apparatus and nozzle protection device
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US Patent 8003966 Transportation container and assembly
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US Patent 8003967 Radiation-shielding assemblies and methods of using the same
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US Patent 8008618 Multipole ion guide for providing an axial electric field whose strength increases with radial position, and a method of operating a multipole ion guide having such an axial electric field
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US Patent 8008629 Charged particle beam device and method for inspecting specimen
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US Patent 8008630 Ion implantation apparatus and method of correcting deviation angle of ion beam
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US Patent 8008632 Two-zone ion beam carbon deposition
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US Patent 8011016 SPM probe with shortened cantilever
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US Patent 8013290 Method and apparatus for avoiding undesirable mass dispersion of ions in flight
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US Patent 8013298 Electrostatic electron spectrometry apparatus
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US Patent 8013316 Metallic screens for sub-wavelength focusing of electromagnetic waves
Edits on 13 Dec, 2021
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Golden AI
edited on 13 Dec, 2021
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Patent primary examiner of
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US Patent 8013316 Metallic screens for sub-wavelength focusing of electromagnetic waves
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Golden AI
edited on 13 Dec, 2021
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Patent primary examiner of
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US Patent 8013298 Electrostatic electron spectrometry apparatus
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Golden AI
edited on 13 Dec, 2021
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Patent primary examiner of
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US Patent 8013290 Method and apparatus for avoiding undesirable mass dispersion of ions in flight
Edits on 8 Dec, 2021
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Golden AI
edited on 8 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 8011016 SPM probe with shortened cantilever
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Golden AI
edited on 8 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 8008632 Two-zone ion beam carbon deposition
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Golden AI
edited on 8 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 8008630 Ion implantation apparatus and method of correcting deviation angle of ion beam
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Golden AI
edited on 8 Dec, 2021
Edits made to:
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Infobox
Patent primary examiner of
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US Patent 8008629 Charged particle beam device and method for inspecting specimen
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edited on 8 Dec, 2021
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Golden AI
edited on 8 Dec, 2021
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Patent primary examiner of
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US Patent 8003967 Radiation-shielding assemblies and methods of using the same
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edited on 8 Dec, 2021
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Patent primary examiner of
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US Patent 8003966 Transportation container and assembly
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Golden AI
edited on 8 Dec, 2021
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Patent primary examiner of
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US Patent 8003962 Extreme ultraviolet light source apparatus and nozzle protection device
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Golden AI
edited on 8 Dec, 2021
Edits made to:
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Infobox
Patent primary examiner of
‌
US Patent 8003957 Ethane implantation with a dilution gas
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Golden AI
edited on 8 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 8003956 Method and apparatus for controlling beam current uniformity in an ion implanter
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Golden AI
edited on 8 Dec, 2021
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Golden AI
edited on 8 Dec, 2021
Edits made to:
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Patent primary examiner of
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US Patent 8003937 Electrospray ion source with reduced analyte electrochemistry
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edited on 8 Dec, 2021
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Golden AI
edited on 8 Dec, 2021
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Patent primary examiner of
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US Patent 7999224 Ion mobility spectrometers
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edited on 8 Dec, 2021
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Patent primary examiner of
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US Patent 7994486 Substrate scanner apparatus
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edited on 8 Dec, 2021
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US Patent 7994476 Apparatus and method for enhancing voltage contrast of a wafer

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