Obsidian Sensors, Inc. SBIR Phase II Award, July 2021

We propose a novel deformable mirror system with unprecedented capabilities: (1) small number of control channels ndash; N channels to control, rather than the typical N2 channels, for an N x N array, (2) Low drive voltage ndash; less than 20V, (3) high resolution stroke control ndash; to 10 pm, (4) expandability to large arrays.nbsp; We can accomplish these by utilizing technologies developed with tools and components used in the flat panel display industry, as well as our unique drive scheme that uses controlled charge rather than voltage for electrostatic actuation.nbsp; The DM fabrication method will leverage heavily on Obsidian Sensorsrsquo; IMG (integrated MEMS on glass), which is a relatively high TRL technology.