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Luz Alejandro-Mulero
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Edits on 14 Dec, 2021
"Remove inverse infobox"
Golden AI
edited on 14 Dec, 2021
Edits made to:
Infobox
(
-19
properties)
Infobox
Patent primary examiner of
US Patent 7094315 Chamber configuration for confining a plasma
US Patent 7097735 Plasma processing device
US Patent 7112352 Apparatus and method for depositing large area coatings on planar surfaces
US Patent 7128805 Multiple elliptical ball plasma apparatus
US Patent 7135089 Method and apparatus for plasma processing
US Patent 7163602 Apparatus for generating planar plasma using concentric coils and ferromagnetic cores
US Patent 7163603 Plasma source assembly and method of manufacture
US Patent 7169255 Plasma processing apparatus
US Patent 7223321 Faraday shield disposed within an inductively coupled plasma etching apparatus
US Patent 7234412 Semiconductor substrate deposition processor chamber liner apparatus
US Patent 7241360 Method and apparatus for neutralization of ion beam using AC ion source
US Patent 7255774 Process apparatus and method for improving plasma production of an inductively coupled plasma
US Patent 7255775 Semiconductor wafer treatment member
US Patent 7314525 Plasma CVD apparatus
US Patent 7316199 Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
US Patent 7338577 Inductively coupled plasma processing apparatus having internal linear antenna for large area processing
US Patent 7354501 Upper chamber for high density plasma CVD
US Patent 7374636 Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
US Patent 7381292 Inductively coupled plasma generating apparatus incorporating serpentine coil antenna
Edits on 30 Nov, 2021
Golden AI
edited on 30 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7381292 Inductively coupled plasma generating apparatus incorporating serpentine coil antenna
Golden AI
edited on 29 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7374636 Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
Edits on 25 Nov, 2021
Golden AI
edited on 25 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7354501 Upper chamber for high density plasma CVD
Edits on 23 Nov, 2021
Golden AI
edited on 23 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7338577 Inductively coupled plasma processing apparatus having internal linear antenna for large area processing
Golden AI
edited on 23 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7316199 Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
Golden AI
edited on 23 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7314525 Plasma CVD apparatus
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7255774 Process apparatus and method for improving plasma production of an inductively coupled plasma
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7255775 Semiconductor wafer treatment member
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7241360 Method and apparatus for neutralization of ion beam using AC ion source
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7234412 Semiconductor substrate deposition processor chamber liner apparatus
Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7223321 Faraday shield disposed within an inductively coupled plasma etching apparatus
Edits on 21 Nov, 2021
Golden AI
edited on 21 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7169255 Plasma processing apparatus
Golden AI
edited on 21 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7163603 Plasma source assembly and method of manufacture
Golden AI
edited on 21 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7163602 Apparatus for generating planar plasma using concentric coils and ferromagnetic cores
Edits on 19 Nov, 2021
Golden AI
edited on 19 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7135089 Method and apparatus for plasma processing
Edits on 18 Nov, 2021
Golden AI
edited on 18 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7128805 Multiple elliptical ball plasma apparatus
Edits on 17 Nov, 2021
Golden AI
edited on 17 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7112352 Apparatus and method for depositing large area coatings on planar surfaces
Golden AI
edited on 17 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7097735 Plasma processing device
Golden AI
edited on 16 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7094315 Chamber configuration for confining a plasma
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