H01L 21/3226
Treatment of semiconductor bodies using processes or apparatus not provided for in groups [CPC: H01L21/20] - [CPC: H01L21/26] to modify their internal properties, e.g. to produce internal imperfections {of silicon bodies, e.g. for gettering of silicon on insulator}
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Edits on 16 Mar, 2022
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H01L 21/3226
Treatment of semiconductor bodies using processes or apparatus not provided for in groups [CPC: H01L21/20] - [CPC: H01L21/26] to modify their internal properties, e.g. to produce internal imperfections {of silicon bodies, e.g. for gettering of silicon on insulator}
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