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Della J. Rutledge

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Edits on 15 Dec, 2021
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edited on 15 Dec, 2021
Edits made to:
Infobox (-66 properties)
Infobox
Patent primary examiner of
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US Patent 7375794 Lithographic apparatus and device manufacturing method
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US Patent 7382435 Exposure apparatus
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US Patent 7391495 Stage apparatus, exposure system using the same, and device manufacturing method
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US Patent 7397536 Projection image display apparatus
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US Patent 7397537 Exposure apparatus and exposure method
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US Patent 7400379 Apparatus for measuring an exposure intensity on a wafer
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US Patent 7400380 Two-dimensional light-modulating nano/micro aperture array and high-speed nano pattern recording system utilized with the array
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US Patent 7400382 Light patterning device using tilting mirrors in a superpixel form
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US Patent 7403260 Coating and developing system
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US Patent 7403262 Projection optical system and exposure apparatus having the same
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US Patent 7404681 Coating methods and apparatus for coating
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US Patent 7405809 Illumination system particularly for microlithography
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US Patent 7408615 Lithographic apparatus and device manufacturing method
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US Patent 7408616 Microlithographic exposure method as well as a projection exposure system for carrying out the method
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US Patent 7408617 Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method
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US Patent 7408619 Photolithographic method using exposure system for controlling vertical CD difference
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US Patent 7411651 PSM alignment method and device
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US Patent 7411655 Load-lock technique
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US Patent 7411659 Crop device for framing
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US Patent 7414700 Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
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US Patent 7417707 Introduction of an intermediary refractive layer for immersion lithography
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US Patent 7417713 Optical disc with a theft deterrent coating
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US Patent 7419316 Developing treatment apparatus
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US Patent 7420650 Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording medium
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US Patent 7422383 Photosensitive material processor
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US Patent 7423721 Lithographic apparatus
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US Patent 7423725 Lithographic method
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US Patent 7423727 Lithographic apparatus and device manufacturing method
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US Patent 7423728 Immersion exposure method and apparatus, and manufacturing method of a semiconductor device
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US Patent 7426011 Method of calibrating a lithographic apparatus and device manufacturing method
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US Patent 7426015 Device manufacturing method and lithographic apparatus
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US Patent 7428037 Optical component that includes a material having a thermal longitudinal expansion with a zero crossing
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US Patent 7428040 Lithographic apparatus and device manufacturing method
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US Patent 7428394 Electronic color photography apparatus
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US Patent 7433015 Lithographic apparatus and device manufacturing method
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US Patent 7433017 Method of measuring the position of a mask surface along the height direction, exposure device, and exposure method
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US Patent 7433018 Pattern alignment method and lithographic apparatus
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US Patent 7433019 Exposure apparatus and device manufacturing method
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US Patent 7433020 Apparatus having photoelectric converting element, and device manufacturing method
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US Patent 7440078 Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units
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US Patent 7440082 Method of predicting and minimizing model OPC deviation due to mix/match of exposure tools using a calibrated eigen decomposition model
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US Patent 7443486 Method for predicting a critical dimension of a feature imaged by a lithographic apparatus
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US Patent 7446854 Lithographic apparatus and device manufacturing method
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US Patent 7446857 Image forming method and apparatus
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US Patent 7450216 Immersion exposure technique
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US Patent 7453551 Increasing pulse-to-pulse radiation beam uniformity
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US Patent 7456931 Device manufacturing method, computer program product and lithographic apparatus
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US Patent 7460210 Auto focus system, auto focus method, and exposure apparatus using the same
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US Patent 7460213 Alignment apparatus, exposure apparatus, and device manufacturing method using exposure apparatus
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US Patent 7463330 Lithographic apparatus and device manufacturing method
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US Patent 7463338 Container for housing a mask blank, method of housing a mask blank, and mask blank package
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US Patent 7466394 Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array
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US Patent 7468781 Exposure apparatus
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US Patent 7471371 Exposure apparatus and device fabrication method
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US Patent 7474377 Coating and developing system
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US Patent 7483118 Lithographic projection apparatus and device manufacturing method
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US Patent 7483119 Exposure method, substrate stage, exposure apparatus, and device manufacturing method
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US Patent 7483123 Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
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US Patent 7486377 Developing method and developing apparatus
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US Patent 7486383 Direct exposure apparatus and direct exposure method
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US Patent 7495744 Exposure method, exposure apparatus, and method for producing device
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US Patent 7502095 Lithographic apparatus, device manufacturing method, and device manufactured thereby
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US Patent 7505117 Polarizing element, method of manufacturing polarizing element, method of evaluating exposure apparatus, method of manufacturing semiconductor device, and exposure apparatus
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US Patent 7510341 Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus
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US Patent 7548302 Lithographic apparatus and device manufacturing method
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US Patent 7554648 Blind devices and methods for providing continuous thermophoretic protection of lithographic reticle
Edits on 2 Dec, 2021
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edited on 2 Dec, 2021
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edited on 2 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
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US Patent 7548302 Lithographic apparatus and device manufacturing method
Edits on 2 Dec, 2021
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edited on 2 Dec, 2021
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edited on 2 Dec, 2021
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edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7502095 Lithographic apparatus, device manufacturing method, and device manufactured thereby
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7495744 Exposure method, exposure apparatus, and method for producing device
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7486383 Direct exposure apparatus and direct exposure method
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7486377 Developing method and developing apparatus
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7483123 Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
Golden AI profile picture
Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7483119 Exposure method, substrate stage, exposure apparatus, and device manufacturing method
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7483118 Lithographic projection apparatus and device manufacturing method
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7474377 Coating and developing system
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7471371 Exposure apparatus and device fabrication method
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7468781 Exposure apparatus
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Golden AI
edited on 1 Dec, 2021
Golden AI profile picture
Golden AI
edited on 1 Dec, 2021
Golden AI profile picture
Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7463330 Lithographic apparatus and device manufacturing method
Golden AI profile picture
Golden AI
edited on 1 Dec, 2021
Golden AI profile picture
Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patent primary examiner of
‌
US Patent 7460210 Auto focus system, auto focus method, and exposure apparatus using the same

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