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C23C 14/547

{Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods}

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Edits on 16 Mar, 2022
"Entity importer update"
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Golden AI
edited on 16 Mar, 2022
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C23C 14/545
Edits on 5 Mar, 2022
"Created via: Entity Importer"
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Golden AI
created this topic on 5 Mar, 2022
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 C23C 14/547

{Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods}

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Patent classification
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Cooperative Patent Classification
Website
http://data.epo.org/linked-data/def/cpc/C23C14-547

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