B81C 2203/075
Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure the electronic processing unit being integrated into an element of the micromechanical structure
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Edits on 16 Mar, 2022
Golden AI
Edits on 8 Mar, 2022
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B81C 2203/075
Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure the electronic processing unit being integrated into an element of the micromechanical structure
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