List of Novellus Systems patents

Patents where

Current Assignee

Name

Novellus Systems

Name	Description	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7214630 PMOS transistor with compressive dielectric capping layer	Patent 7214630 was granted and assigned to Novellus Systems on May, 2007 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7214630	May 8, 2007
‌ US Patent 7176039 Dynamic modification of gap fill process characteristics	Patent 7176039 was granted and assigned to Novellus Systems on February, 2007 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7176039	February 13, 2007
‌ US Patent 7327001 PMOS transistor with compressive dielectric capping layer	Patent 7327001 was granted and assigned to Novellus Systems on February, 2008 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7327001	February 5, 2008
‌ US Patent 6867152 Properties of a silica thin film produced by a rapid vapor deposition (RVD) process	Patent 6867152 was granted and assigned to Novellus Systems on March, 2005 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	6867152	March 15, 2005
‌ US Patent 6969619 Full spectrum endpoint detection	Patent 6969619 was granted and assigned to Novellus Systems on November, 2005 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	6969619	November 29, 2005
‌ US Patent 7309407 Method and apparatus for forming an electrical contact with a semiconductor substrate	Patent 7309407 was granted and assigned to Novellus Systems on December, 2007 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7309407	December 18, 2007
‌ US Patent 7585370 Gas-purged vacuum valve	Patent 7585370 was granted and assigned to Novellus Systems on September, 2009 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7585370	September 8, 2009
‌ US Patent 6949450 Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber	Patent 6949450 was granted and assigned to Novellus Systems on September, 2005 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	6949450	September 27, 2005
‌ US Patent 7754014 Gas-purged vacuum valve	Patent 7754014 was granted and assigned to Novellus Systems on July, 2010 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7754014	July 13, 2010
‌ US Patent 6848458 Apparatus and methods for processing semiconductor substrates using supercritical fluids	Patent 6848458 was granted and assigned to Novellus Systems on February, 2005 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	6848458	February 1, 2005
‌ US Patent 7503334 Apparatus and methods for processing semiconductor substrates using supercritical fluids	Patent 7503334 was granted and assigned to Novellus Systems on March, 2009 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7503334	March 17, 2009
‌ US Patent 7572354 Electrochemical processing of conductive surface	Patent 7572354 was granted and assigned to Novellus Systems on August, 2009 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7572354	August 11, 2009
‌ US Patent 8153520 Thinning tungsten layer after through silicon via filling	Patent 8153520 was granted and assigned to Novellus Systems on April, 2012 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	8153520	April 10, 2012
‌ US Patent 8728955 Method of plasma activated deposition of a conformal film on a substrate surface	Patent 8728955 was granted and assigned to Novellus Systems on May, 2014 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	8728955	May 20, 2014
‌ US Patent 6848455 Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species	Patent 6848455 was granted and assigned to Novellus Systems on February, 2005 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	6848455	February 1, 2005
‌ US Patent 7273808 Reactive barrier/seed preclean process for damascene process	Patent 7273808 was granted and assigned to Novellus Systems on September, 2007 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7273808	September 25, 2007
‌ US Patent 7625820 Method of selective coverage of high aspect ratio structures with a conformal film	Patent 7625820 was granted and assigned to Novellus Systems on December, 2009 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7625820	December 1, 2009
‌ US Patent 7416989 Adsorption based material removal process	Patent 7416989 was granted and assigned to Novellus Systems on August, 2008 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7416989	August 26, 2008
‌ US Patent 7977249 Methods for removing silicon nitride and other materials during fabrication of contacts	Patent 7977249 was granted and assigned to Novellus Systems on July, 2011 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7977249	July 12, 2011
‌ US Patent 7115017 Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization	Patent 7115017 was granted and assigned to Novellus Systems on October, 2006 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7115017	October 3, 2006
‌ US Patent 7781327 Resputtering process for eliminating dielectric damage	Patent 7781327 was granted and assigned to Novellus Systems on August, 2010 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7781327	August 24, 2010
‌ US Patent 7558045 Electrostatic chuck assembly with capacitive sense feature, and related operating method	Patent 7558045 was granted and assigned to Novellus Systems on July, 2009 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7558045	July 7, 2009
‌ US Patent 7915166 Diffusion barrier and etch stop films	Patent 7915166 was granted and assigned to Novellus Systems on March, 2011 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7915166	March 29, 2011
‌ US Patent 7309406 Method and apparatus for plating and polishing semiconductor substrate	Patent 7309406 was granted and assigned to Novellus Systems on December, 2007 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	7309406	December 18, 2007
‌ US Patent 8124531 Depositing tungsten into high aspect ratio features	Patent 8124531 was granted and assigned to Novellus Systems on February, 2012 by the United States Patent and Trademark Office.	Novellus Systems	United States Patent and Trademark Office	8124531	February 28, 2012

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