Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chun-Ren Cheng1
Shih-Wei Lin1
Wei-Cheng Shen1
Yi-Hsien Chang1
Date of Patent
May 5, 2015
1Patent Application Number
140330891
Date Filed
September 20, 2013
1Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure provides a biological field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET includes a microwells having a sensing layer, a top metal stack under the sensing layer, and a multi-layer interconnect (MLI) under the top metal stack. The top metal stack includes a top metal and a protective layer over and peripherally surrounding the top metal.
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