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US Patent 8394229 Susceptor ring

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Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8394229
Date of Patent
March 12, 2013
Patent Application Number
12187933
Date Filed
August 7, 2008
Patent Citations Received
‌
US Patent 11764101 Susceptor for semiconductor substrate processing
Patent Primary Examiner
‌
Parviz Hassanzadeh
Patent abstract

A one-piece susceptor ring for housing at least one temperature measuring device is provided. The susceptor ring includes a plate having an aperture formed therethrough and a pair of side ribs integrally connected to a lower surface of the plate. The side ribs are located on opposing sides of the aperture. The susceptor ring further includes a bore formed in each of the pair of side ribs. Each bore is configured to receive a temperature measuring device therein.

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