US Patent 8258492 Differential evacuation system
Patent 8258492 was granted and assigned to Gigaphoton Inc on September, 2012 by the United States Patent and Trademark Office.
All edits
Edits on 29 Nov, 2023
Golden AI
Edits made to:
Article (+431 characters)
Article
Patent abstract
[Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path.
Edits on 21 Sep, 2023
Golden AI
Edits made to:
Infobox (+2 properties)
Infobox
Patent Inventor Names
Hiroshi Someya0
Yukio Watanabe0
Edits on 16 Jul, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 08258492 Differential evacuation system US Patent 8258492 Differential evacuation system
Infobox
Patent Number
08258492
Patent Number
8258492
Edits on 15 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 08258492 Differential evacuation system
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08258492
Date of patent
September 4, 2012
Patent application number
12631258
Date Filed
December 4, 2009
Patent primary examiner
Find more entities like US Patent 8258492 Differential evacuation system
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.