Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroshi Someya1
Yukio Watanabe1
Date of Patent
September 4, 2012
Patent Application Number
12631258
Date Filed
December 4, 2009
Patent Primary Examiner
Patent abstract
[Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path.
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