US Patent 7997126 Texture measuring apparatus and method

A texture measuring apparatus that measures surface information of an object includes: a probe coming into contact with the object while moving on a surface of the object; a first sensor unit, provided at the probe, for detecting a force acting on the probe in a direction perpendicular to a lengthwise direction of the probe; and a second sensor unit, provided at the rear of the probe, for detecting a force acting on the probe in the lengthwise direction of the probe. The apparatus further includes a third sensor unit, provided between the first sensor unit and the second sensor unit, for detecting variations in the forces acting on the probe.