US Patent 7993462 Substrate-supporting device having continuous concavity
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Patent abstract
A substrate-supporting device has a top surface for placing a substrate thereon composed of a plurality of surfaces separated from each other and defined by a continuous concavity being in gas communication with at least one through-hole passing through the substrate-supporting device in its thickness direction. The continuous concavity is adapted to allow gas to flow in the continuous concavity and through the through-hole under a substrate placed on the top surface.
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US Patent 07993462 Substrate-supporting device having continuous concavity US Patent 7993462 Substrate-supporting device having continuous concavity
Infobox
Patent Number
0799346200
Patent Number
799346200
Edits on 4 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079934620
Date of Patent
August 9, 2011
0Patent Application Number
120517690
Date Filed
March 19, 2008
0Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079934620
Date of Patent
August 9, 2011
0Patent Application Number
120517690
Date Filed
March 19, 2008
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07993462 Substrate-supporting device having continuous concavity
Infobox
Is a
Patent jurisdiction
Patent number
07993462
Date of patent
August 9, 2011
Patent application number
12051769
Date Filed
March 19, 2008
Patent primary examiner
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