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US Patent 7939244 Photosensitive hardmask for microlithography

Patent 7939244 was granted and assigned to Brewer Science on May, 2011 by the United States Patent and Trademark Office.

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US Patent 11972948 Adhesion layers for EUV lithography
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Patent abstract

New hardmask compositions comprising non-polymeric, metal-containing nanoparticles dispersed or dissolved in a solvent system and methods of using those compositions as hardmask layers in microelectronic structures are provided. The compositions are photosensitive and capable of being rendered developer soluble upon exposure to radiation. The inventive hardmask layer is patterned simultaneously with the photoresist layer and provides plasma etch resistance for subsequent pattern transfer.

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US Patent 07939244 Photosensitive hardmask for microlithography US Patent 7939244 Photosensitive hardmask for microlithography

Infobox
Patent Number
0793924400
Patent Number
793924400
Edits on 23 Apr, 2023
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edited on 23 Apr, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Brewer Science
Brewer Science
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
079392440
Date of Patent
May 10, 2011
0
Patent Application Number
123865940
Date Filed
April 21, 2009
0
Patent Primary Examiner
‌
Amanda C. Walke
0
Edits on 23 Sep, 2022
"Entity importer update"
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edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Brewer Science
Brewer Science
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
079392440
Date of Patent
May 10, 2011
0
Patent Application Number
123865940
Date Filed
April 21, 2009
0
Patent Primary Examiner
‌
Amanda C. Walke
0
Edits on 7 Dec, 2021
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created this topic on 7 Dec, 2021
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 US Patent 07939244 Photosensitive hardmask for microlithography

Infobox
Is a
Patent
Patent
Current assignee
Brewer Science
Brewer Science
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07939244
Date of patent
May 10, 2011
Patent application number
12386594
Date Filed
April 21, 2009
Patent primary examiner
‌
Amanda C. Walke

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