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US Patent 7906396 Flash memory and method of fabricating the same

Patent 7906396 was granted and assigned to Winbond Electronics on March, 2011 by the United States Patent and Trademark Office.

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Patent
Patent
1

Patent attributes

Current Assignee
Winbond Electronics
Winbond Electronics
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
79063961
Patent Inventor Names
Hsiu-Han Liao1
Lu-Ping Chiang1
Date of Patent
March 15, 2011
1
Patent Application Number
125527771
Date Filed
September 2, 2009
1
Patent Primary Examiner
‌
Charles D. Garber
1
Patent abstract

In a method of fabricating a flash memory, a substrate with isolation structures formed therein and a dielectric layer and a floating gate formed thereon between isolation structures is provided. A mask layer is formed on the substrate, covering the isolation structures in a periphery region and the isolation structure in a cell region adjacent to the periphery region. The isolation structures in the cell region not covered by the mask layer are partially removed. Therefore, a first height difference is between surfaces of the isolation structures in the periphery region and a surface of the dielectric layer, and between a surface of the isolation structure in the cell region adjacent to the periphery region and the surface of the dielectric layer. A second height difference smaller than the first height difference is between surfaces of other isolation structures in the cell region and the surface of the dielectric layer.

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