US Patent 7862316 Foamed mechanical planarization pads made with supercritical fluid

Patent 7862316 was granted and assigned to Micron Technology on January, 2011 by the United States Patent and Trademark Office.

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Patent abstract

Foamed thermoplastic polymeric mechanical planarization polishing pads (“MP pads”) made with supercritical fluids are presented. A supercritical fluid foaming agent is dissolved in a thermoplastic polymer. A rapid change in the solubility and volume of the supercritical fluid foaming agent in the thermoplastic polymer results in foaming of the thermoplastic polymer. Foamed thermoplastic polymeric MP pads are advantageously both significantly and uniformly porous.

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Stephen J. Kramer0

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