Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 14, 2010
Patent Application Number
11754813
Date Filed
May 29, 2007
Patent Primary Examiner
Patent abstract
One possible embodiment is a method of manufacturing a structure on or in a substrate with the following stepsa) positioning at least one spacer structure by a spacer technique on the substrate,b) using at least one of the groups of the spacer structure and a structure generated by the spacer structure as a mask for a subsequent particle irradiation step for generating a latent image in the substratec) using the latent image for further processing the substrate.
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