US Patent 7794614 Methods for generating sublithographic structures

One possible embodiment is a method of manufacturing a structure on or in a substrate with the following stepsa) positioning at least one spacer structure by a spacer technique on the substrate,b) using at least one of the groups of the spacer structure and a structure generated by the spacer structure as a mask for a subsequent particle irradiation step for generating a latent image in the substratec) using the latent image for further processing the substrate.