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US Patent 7704857 Method of manufacturing semiconductor device

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
77048571
Patent Inventor Names
Daisuke Ito1
Date of Patent
April 27, 2010
1
Patent Application Number
123358611
Date Filed
December 16, 2008
1
Patent Citations Received
‌
US Patent 11756843 Semiconductor devices including scribe lane and method of manufacturing the semiconductor devices
Patent Primary Examiner
‌
Alexander G Ghyka
1
Patent abstract

After a semiconductor element is formed and before resin sealing is performed, a surface of a scribe line between the adjacent semiconductor elements of a semiconductor wafer is scraped thinly. A laser is irradiated on a broken layer of the surface of the scribe line thus scraped thinly to recrystallize the broken layer.

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