Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
James Maguire1
Shi Yuan1
Christopher A. Michaluk1
Date of Patent
October 13, 2009
1Patent Application Number
114312591
Date Filed
May 10, 2006
1Patent Primary Examiner
Patent abstract
A method of forming a sputtering target and other metal articles having controlled oxygen and nitrogen content levels and the articles so formed are described. The method includes surface-nitriding a deoxidized metal powder and further includes consolidating the powder by a powder metallurgy technique. Preferred metal powders include, but are not limited to, valve metals, including tantalum, niobium, and alloys thereof.
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