US Patent 7601296 Powder metallurgy sputtering targets and methods of producing same
Patent 7601296 was granted and assigned to Cabot Corporation on October, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Christopher A. Michaluk0
James Maguire0
Shi Yuan0
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Patent abstract
A method of forming a sputtering target and other metal articles having controlled oxygen and nitrogen content levels and the articles so formed are described. The method includes surface-nitriding a deoxidized metal powder and further includes consolidating the powder by a powder metallurgy technique. Preferred metal powders include, but are not limited to, valve metals, including tantalum, niobium, and alloys thereof.
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US Patent 07601296 Powder metallurgy sputtering targets and methods of producing same US Patent 7601296 Powder metallurgy sputtering targets and methods of producing same
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Patent Number
076012960
Patent Number
76012960
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Official Website
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Current Assignee
Patent Jurisdiction
Patent Number
076012960
Date of Patent
October 13, 2009
0Patent Application Number
114312590
Date Filed
May 10, 2006
0Official Website
Patent Primary Examiner
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US Patent 07601296 Powder metallurgy sputtering targets and methods of producing same
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07601296
Date of patent
October 13, 2009
Patent application number
11431259
Date Filed
May 10, 2006
Patent primary examiner
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