US Patent 7567367 Micro-mirror device and array thereof
Patent 7567367 was granted and assigned to LG on July, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Changhyeon Ji0
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Patent abstract
A micro mirror device and an array thereof are disclosed wherein an outer frame is formed at a position distanced from a mirror plate, thereby reducing a dynamic deformation of the mirror plate, preventing degradation of beam reflected from the mirror plate, and enabling to maintain a balance of the mirror plate. A frame structure supporting a diaphragm of a mirror plate is made to be thinner as it is distanced from a central axis of the mirror plate, thereby reducing a dynamic deformation of the mirror plate to a great extent and embodying the lightness of the device.
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US Patent 07567367 Micro-mirror device and array thereof US Patent 7567367 Micro-mirror device and array thereof
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Patent Number
075673670
Patent Number
75673670
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Current Assignee
0
Patent Jurisdiction
Patent Number
075673670
Date of Patent
July 28, 2009
0Patent Application Number
115088210
Date Filed
August 24, 2006
0Official Website
Patent Primary Examiner
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US Patent 07567367 Micro-mirror device and array thereof
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07567367
Date of patent
July 28, 2009
Patent application number
11508821
Date Filed
August 24, 2006
Patent primary examiner
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