Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Changhyeon Ji0
Date of Patent
July 28, 2009
0Patent Application Number
115088210
Date Filed
August 24, 2006
0Patent Primary Examiner
Patent abstract
A micro mirror device and an array thereof are disclosed wherein an outer frame is formed at a position distanced from a mirror plate, thereby reducing a dynamic deformation of the mirror plate, preventing degradation of beam reflected from the mirror plate, and enabling to maintain a balance of the mirror plate. A frame structure supporting a diaphragm of a mirror plate is made to be thinner as it is distanced from a central axis of the mirror plate, thereby reducing a dynamic deformation of the mirror plate to a great extent and embodying the lightness of the device.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
