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US Patent 7518151 Gallium nitride/sapphire thin film having reduced bending deformation

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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7518151
Date of Patent
April 14, 2009
Patent Application Number
11869080
Date Filed
October 9, 2007
Patent Primary Examiner
‌
Hoai V Pham
Patent abstract

The present invention relates to a gallium nitride/sapphire thin film, wherein a curvature radius thereof is positioned on the right side of a curve plotted from the following functional formula (I):Y=Y0+A·e−(x1−1)/T1+B·(1−e−x2/T2)  (I)whereinY is the curvature radius (m) of a gallium nitride/sapphire thin film,x1 is the thickness (μm) of a gallium nitride layer,x2 is the thickness (mm) of a sapphire substrate,Y0 is −107±2.5,A is 24.13±0.50,B is 141±4.5,T1 is 0.56±0.04, andT2 is 0.265±0.5.

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