Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mitsuo Koizumi1
Osamu Urakawa1
Shintaro Hayashi1
Date of Patent
January 20, 2009
1Patent Application Number
114152781
Date Filed
May 2, 2006
1Patent Primary Examiner
Patent abstract
A temperature control apparatus includes a socket holder which is provided on a tester head and holds a socket to mount an IC chip. A socket cover has an opening to pass the end of a handler pusher for holding the IC chip on testing. The socket cover forms a closed space around the IC chip in a state that the IC chip is pressed to the socket by the pusher. A gas supplying unit externally supplies the closed space with gas of a predetermined temperature.
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