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US Patent 7466537 Capacitor and its manufacturing method

Patent 7466537 was granted and assigned to Seiko Epson on December, 2008 by the United States Patent and Trademark Office.

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Patent attributes

Current Assignee
Seiko Epson
Seiko Epson
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7466537
Patent Inventor Names
Masao Nakayama1
Date of Patent
December 16, 2008
Patent Application Number
11626454
Date Filed
January 24, 2007
Patent Primary Examiner
‌
Eric Thomas
Patent abstract

A method for manufacturing a capacitor includes the steps of: forming a lanthanum nickelate layer above a base substrate; forming a dielectric layer above the lanthanum nickelate layer; forming a conductive layer above the dielectric layer; and patterning at least the dielectric layer until the lanthanum nickelate layer is exposed.

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