Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hua-Shu Wu1
Chia-Hua Chang1
Date of Patent
December 2, 2008
1Patent Application Number
114636291
Date Filed
August 10, 2006
1Patent Primary Examiner
Patent abstract
The invention provides a method of fabricating a micromachined structure, and in particular to a method of forming a micro-electro-mechanical system (MEMS) structure. A thin silicon cantilevered or suspended structure used to make micromachined structures is first formed from a SOI wafer or a bulk silicon wafer, followed by formation of the micromachined structures by semiconductor manufacturing techniques.
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