US Patent 7423102 Star polymer
Patent 7423102 was granted and assigned to Sumitomo Chemical on September, 2008 by the United States Patent and Trademark Office.
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Patent abstract
The present invention provides a star polymer which comprises a central core and three or more branches bonded to the central core, and has a weight average molecular weight of from 1,000 to 100,000, wherein at least one of the branches containing at least one repeating unit selected from the group consisting of the following repeating units (1), (2), (3), (4) and (9); and a process for producing the star polymer. The present invention also provides a chemically amplified positive resist composition comprising the star polymer and an acid generator.
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US Patent 07423102 Star polymer US Patent 7423102 Star polymer
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Patent Number
0742310200
Patent Number
742310200
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074231020
Date of Patent
September 9, 2008
0Patent Application Number
111697900
Date Filed
June 30, 2005
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074231020
Date of Patent
September 9, 2008
0Patent Application Number
111697900
Date Filed
June 30, 2005
0Official Website
Patent Primary Examiner
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US Patent 07423102 Star polymer
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07423102
Date of patent
September 9, 2008
Patent application number
11169790
Date Filed
June 30, 2005
Patent primary examiner
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