Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 17, 2008
Patent Application Number
11224847
Date Filed
September 13, 2005
Patent Primary Examiner
Patent abstract
Method and system for obtaining a potential distribution image of a specimen using two probes having two probes contacted with a patterned surface of the specimen, a scanning unit for scanning a beam of electrons or ions over the specimen, a potential detection unit for detecting the electric potential at an arbitrary position on the specimen using the probes, and an acquisition unit for obtaining a potential distribution image of the specimen while synchronizing the output from the potential detection unit with the scanning of the beam.
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