US Patent 7358195 Method for fabricating liquid crystal display device

In etching a metal line formed as a dual layer of aluminum alloy and molybdenum, the metal line consisting of the dual layer of aluminum alloy and molybdenum is etched through one-time wet etching by applying the etchant including HNO3, HClO4, a Ferric compound (Fe3+), and a Flouro compound (F−), the process can be reduced and a metal line having a good profile can be formed.