US Patent 7165460 Temperature compensated pressure sensor

A pressure sensor (30) for environments with wide ranging temperature variations such as vehicle tires. The sensor has a sensor membrane (53) exposed to the fluid pressure to be sensed, and a reference membrane subject to a predetermined pressure difference. Both membranes are conductive and connected to circuitry that converts the deflection in the sensor membrane into an output signal indicative of the pressure difference across the sensor membrane, and converts the deflection of the reference membrane into a temperature compensation value used to adjust the output signal into a temperature compensated signal indicate of the fluid pressure to be sensed.