Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kevin P. O'Brien1
Steven W. Johnston1
Date of Patent
July 4, 2006
1Patent Application Number
111016881
Date Filed
April 8, 2005
1Patent Citations Received
Patent Primary Examiner
Patent abstract
An interlayer dielectric may be exposed to a gas cluster ion beam to densify an upper layer of the interlayer dielectric. As a result, the upper layer of the interlayer dielectric may be densified without separate deposition steps and without the need for etch stops that may adversely affect the capacitance of the overall structure.
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