US Patent 6867866 CD metrology analysis using green's function
Patent 6867866 was granted and assigned to Therma-Wave on March, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 5, 2002
0
Date of Patent
March 15, 2005
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Patent Application Number
10212385
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Patent Inventor Names
Jon Opsal
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Hanyou Chu
0
Yia Chung Chang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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