Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ronald S. Cok0
Lei Liu0
António José Marques Trindade0
Date of Patent
January 2, 2024
0Patent Application Number
179786420
Date Filed
November 1, 2022
0Patent Citations
Patent Primary Examiner
Patent abstract
A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
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