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US Patent 11863154 Non-linear tethers for suspended devices

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 US Patent 11863154 Non-linear tethers for suspended devices

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Patent abstract

A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.

Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
118631540
Patent Inventor Names
António José Marques Trindade0
Lei Liu0
Ronald S. Cok0
Date of Patent
January 2, 2024
0
Patent Application Number
179786420
Date Filed
November 1, 2022
0
Patent Citations
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US Patent 7195733 Composite patterning devices for soft lithography
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US Patent 7662545 Decal transfer lithography
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US Patent 7704684 Methods and devices for fabricating three-dimensional nanoscale structures
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US Patent 7799699 Printable semiconductor structures and related methods of making and assembling
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US Patent 7932123 Release strategies for making transferable semiconductor structures, devices and device components
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US Patent 7943491 Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
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US Patent 7972875 Optical systems fabricated by printing-based assembly
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US Patent 8333860 Method of transferring a micro device
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US Patent 8470701 Printable, flexible and stretchable diamond for thermal management
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US Patent 8558243 Micro device array for transfer to a receiving substrate
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US Patent 8791474 Light emitting diode display with redundancy scheme
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US Patent 8794501 Method of transferring a light emitting diode
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US Patent 8835940 Micro device stabilization post
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US Patent 8865489 Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays
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US Patent 8877648 Methods of forming printable integrated circuit devices by selective etching to suspend the devices from a handling substrate and devices formed thereby
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US Patent 8889485 Methods for surface attachment of flipped active componenets
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US Patent 8934259 Substrates with transferable chiplets
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US Patent 8941215 Micro device stabilization post
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US Patent 8987765 Reflective bank structure and method for integrating a light emitting device
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US Patent 9049797 Electrically bonded arrays of transfer printed active components
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US Patent 9087764 Adhesive wafer bonding with controlled thickness variation
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US Patent 9105714 Stabilization structure including sacrificial release layer and staging bollards
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US Patent 9111464 LED display with wavelength conversion layer
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US Patent 9139425 Process for manufacturing electro-mechanical systems
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US Patent 9153171 Smart pixel lighting and display microcontroller
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US Patent 9161448 Laser assisted transfer welding process
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US Patent 9165989 High-yield fabrication of large-format substrates with distributed, independent control elements
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US Patent 9166114 Stabilization structure including sacrificial release layer and staging cavity
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US Patent 9178123 Light emitting device reflective bank structure
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US Patent 9217541 Stabilization structure including shear release posts
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US Patent 9240397 Method for integrating a light emitting device
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US Patent 9252375 Method of fabricating a light emitting diode display with integrated defect detection test
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US Patent 9318998 Acoustically-engineered multi-port piezoelectric-on-semiconductor resonators for accurate temperature sensing and reference signal generation
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US Patent 9355854 Methods of fabricating printable compound semiconductor devices on release layers
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US Patent 9358775 Apparatus and methods for micro-transfer-printing
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US Patent 9367094 Display module and system applications
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US Patent 9412727 Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion
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US Patent 9478583 Wearable display having an array of LEDs on a conformable silicon substrate
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US Patent 9484504 Micro LED with wavelength conversion layer
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US Patent 9520537 Micro assembled LED displays and lighting elements
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US Patent 9555644 Non-contact transfer printing
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US Patent 9583533 LED device with embedded nanowire LEDs
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US Patent 9589944 Method and structure for receiving a micro device
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US Patent 9601356 Systems and methods for controlling release of transferable semiconductor structures
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US Patent 9640715 Printable inorganic semiconductor structures
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US Patent 9716082 Micro assembled hybrid displays and lighting elements
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US Patent 9761754 Systems and methods for preparing GaN and related materials for micro assembly
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US Patent 9765934 Thermally managed LED arrays assembled by printing
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US Patent 9865832 Light emitting diode display with redundancy scheme
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US Patent 9929053 Systems and methods for controlling release of transferable semiconductor structures
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US Patent 9991863 Rounded and curved integrated tethers for quartz resonators
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US Patent 10389392 High-Q quartz-based inductor array for antenna matching
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US Patent 10832934 Multi-layer tethers for micro-transfer printing
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Patent Primary Examiner
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Lana N Le
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CPC Code
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D07B 5/005
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H01B 9/006
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H01L 23/5226
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H03H 9/2452
0
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H03H 9/2431
0
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H03H 9/173
0
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H03H 2009/155
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H03H 9/13
0
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H03H 9/132
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H01L 21/76832
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H03H 9/02338
0
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H03H 9/02362
0
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H03H 9/02377
0
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H03H 2009/0237
0
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H03H 2009/02346
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H03H 9/02228
0
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H03H 9/02157
0
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H03H 3/02
0
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H03H 2003/027
0
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H03H 3/0073
0

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