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US Patent 11694925 Diffusion barrier collar for interconnects

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Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
116949251
Date of Patent
July 4, 2023
1
Patent Application Number
173131851
Date Filed
May 6, 2021
1
Patent Citations
‌
US Patent 11296044 Bond enhancement structure in microelectronics for trapping contaminants during direct-bonding processes
1
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US Patent 11264357 Mixed exposure for large die
1
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US Patent 11276676 Stacked devices and methods of fabrication
1
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US Patent 11296053 Direct bonded stack structures for increased reliability and improved yield in microelectronics
1
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US Patent 11329034 Direct-bonded LED structure contacts and substrate contacts
1
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US Patent 11348898 Systems and methods for releveled bump planes for chiplets
1
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US Patent 11355404 Mitigating surface damage of probe pads in preparation for direct bonding of a substrate
1
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US Patent 11355443 Dielets on flexible and stretchable packaging for microelectronics
1
...
Patent Primary Examiner
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Thanh Y. Tran
1
CPC Code
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H01L 2224/08237
1
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H01L 21/76843
1
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H01L 21/68
1
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H01L 23/53238
1
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H01L 24/09
1
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H01L 21/76831
1
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H01L 24/06
1
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H01L 24/08
1
...

Representative implementations of techniques and devices are used to reduce or prevent conductive material diffusion into insulating or dielectric material of bonded substrates. Misaligned conductive structures can come into direct contact with a dielectric portion of the substrates due to overlap, especially while employing direct bonding techniques. A barrier interface that can inhibit the diffusion is disposed generally between the conductive material and the dielectric at the overlap.

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