US Patent 11388525 MEMS microphone and a manufacturing method thereof
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Quanbo Zou0
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US Patent 11388525 MEMS microphone and a manufacturing method thereof
Article
A MEMS microphone and a manufacturing method thereof are provided. The MEMS microphone comprises a MEMS microphone chip and a housing with an acoustic port. The MEMS microphone chip is mounted in the housing, and a mesh plug is mounted in the acoustic port and made from a mesh material which has a mesh structure that is suitable for passage of sound.
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Patent number
11388525
Date of patent
July 12, 2022
Patent application number
16614984
Date Filed
May 31, 2017
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