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US Patent 11335540 Impedance matching network and method

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Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11335540
Date of Patent
May 17, 2022
Patent Application Number
16778181
Date Filed
January 31, 2020
Patent Citations
‌
US Patent 10269540 Impedance matching system and method of operating the same
Patent Citations Received
‌
US Patent 12112919 Load current derived switch timing of switching resonant topology
3
Patent Primary Examiner
‌
Samuel S Outten
CPC Code
‌
H01J 2237/332
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H01J 2237/334
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H01J 37/32183
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H03H 7/40
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H03H 11/30
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H01L 22/26
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H01J 2237/24564

In one embodiment, an impedance matching network includes a mechanically variable capacitor (MVC), a second variable capacitor, and a control circuit. The control circuit carries out a first process of determining a second variable capacitor configuration for reducing a reflected power at the RF source output, and altering the second variable capacitor to the second variable capacitor configuration. The control circuit also carries out a second process of determining an RF source frequency, and, upon determining that the RF source frequency is outside, at a minimum, or at a maximum of a predetermined frequency range, determining a new MVC configuration to cause the RF source frequency, according to an RF source frequency tuning process, to be altered to be within or closer to the predetermined frequency range. The determination of the new MVC configuration is based on the RF source frequency and the predetermined frequency range.

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