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US Patent 10903104 Dual scara arm

Patent 10903104 was granted and assigned to Brooks Automation on January, 2021 by the United States Patent and Trademark Office.

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Applicant
Brooks Automation
Brooks Automation
1
Current Assignee
Brooks Automation
Brooks Automation
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
109031041
Patent Inventor Names
Antonio F. Pietrantonio1
Anthony Chesna1
Hakan Elmali1
Ulysses Gilchrist1
Date of Patent
January 26, 2021
1
Patent Application Number
162018991
Date Filed
November 27, 2018
1
Patent Citations Received
‌
US Patent 11894252 Substrate transport apparatus
2
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US Patent 11587813 Substrate transport apparatus
3
Patent Primary Examiner
‌
Ronald P Jarrett
1
Patent abstract

A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

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