Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christopher Hofmeister0
Dennis Poole0
Martin Hosek0
Date of Patent
July 30, 2019
0Patent Application Number
137965780
Date Filed
March 12, 2013
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
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