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H01L 21/02345

{Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light}

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data.epo.org/linked-data/def/cpc/H01L21-02345
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Patent classification

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Child Classification
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H01L 21/02351
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H01L 21/02348
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H01L 21/02354
Classification Type
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Cooperative Patent Classification
Parent Classification
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H01L 21/02318
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