List of Zygo Corporation patents

Patents where

Current Assignee

Name

Zygo Corporation

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7612893 Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts	Patent 7612893 was granted and assigned to Zygo Corporation on November, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7612893	November 3, 2009
‌ US Patent 7697195 Apparatus for reducing wavefront errors in output beams of acousto-optic devices	Patent 7697195 was granted and assigned to Zygo Corporation on April, 2010 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7697195	April 13, 2010
‌ US Patent 7492469 Interferometry systems and methods using spatial carrier fringes	Patent 7492469 was granted and assigned to Zygo Corporation on February, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7492469	February 17, 2009
‌ US Patent 7636166 Interferometer system for monitoring an object	Patent 7636166 was granted and assigned to Zygo Corporation on December, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7636166	December 22, 2009
‌ US Patent 6856402 Interferometer with dynamic beam steering element	Patent 6856402 was granted and assigned to Zygo Corporation on February, 2005 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	6856402	February 15, 2005
‌ US Patent 7428685 Cyclic error compensation in interferometry systems	Patent 7428685 was granted and assigned to Zygo Corporation on September, 2008 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7428685	September 23, 2008
‌ US Patent 9958254 Calibration of scanning interferometers	Patent 9958254 was granted and assigned to Zygo Corporation on May, 2018 by the United States Patent and Trademark Office.	Zygo Corporation	Zygo Corporation	United States Patent and Trademark Office	9958254	May 1, 2018
‌ US Patent 8379218 Fiber-based interferometer system for monitoring an imaging interferometer	Patent 8379218 was granted and assigned to Zygo Corporation on February, 2013 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	8379218	February 19, 2013
‌ US Patent 7576868 Cyclic error compensation in interferometry systems	Patent 7576868 was granted and assigned to Zygo Corporation on August, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7576868	August 18, 2009
‌ US Patent 7952724 Interferometer with multiple modes of operation for determining characteristics of an object surface	Patent 7952724 was granted and assigned to Zygo Corporation on May, 2011 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7952724	May 31, 2011
‌ US Patent 7616323 Interferometer with multiple modes of operation for determining characteristics of an object surface	Patent 7616323 was granted and assigned to Zygo Corporation on November, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7616323	November 10, 2009
‌ US Patent 7428057 Interferometer for determining characteristics of an object surface, including processing and calibration	Patent 7428057 was granted and assigned to Zygo Corporation on September, 2008 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7428057	September 23, 2008
‌ US Patent 9140537 Interferometric heterodyne optical encoder system	Patent 9140537 was granted and assigned to Zygo Corporation on September, 2015 by the United States Patent and Trademark Office.	Zygo Corporation	Zygo Corporation	United States Patent and Trademark Office	9140537	September 22, 2015
‌ US Patent 7489407 Error correction in interferometry systems	Patent 7489407 was granted and assigned to Zygo Corporation on February, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7489407	February 10, 2009
‌ US Patent 10267617 Method and apparatus for optimizing the optical performance of interferometers	Patent 10267617 was granted and assigned to Zygo Corporation on April, 2019 by the United States Patent and Trademark Office.	Zygo Corporation	Zygo Corporation	United States Patent and Trademark Office	10267617	April 23, 2019
‌ US Patent 11443950 Method for figure control of optical surfaces		Zygo Corporation	Zygo Corporation	United States Patent and Trademark Office	11443950	September 13, 2022
‌ US Patent 9798130 Measuring topography of aspheric and other non-flat surfaces	Patent 9798130 was granted and assigned to Zygo Corporation on October, 2017 by the United States Patent and Trademark Office.	Zygo Corporation	Zygo Corporation	United States Patent and Trademark Office	9798130	October 24, 2017
‌ US Patent 7564566 Method and system for analyzing low-coherence interferometry signals for information about thin film structures	Patent 7564566 was granted and assigned to Zygo Corporation on July, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7564566	July 21, 2009
‌ US Patent 7616322 Cyclic error compensation in interferometry systems	Patent 7616322 was granted and assigned to Zygo Corporation on November, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7616322	November 10, 2009
‌ US Patent 9719777 Interferometer with real-time fringe-free imaging	Patent 9719777 was granted and assigned to Zygo Corporation on August, 2017 by the United States Patent and Trademark Office.	Zygo Corporation	Zygo Corporation	United States Patent and Trademark Office	9719777	August 1, 2017
‌ US Patent 8649024 Non-contact surface characterization using modulated illumination	Patent 8649024 was granted and assigned to Zygo Corporation on February, 2014 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	8649024	February 11, 2014
‌ US Patent 8045175 Equal-path interferometer	Patent 8045175 was granted and assigned to Zygo Corporation on October, 2011 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	8045175	October 25, 2011
‌ US Patent 7495773 In situ determination of pixel mapping in interferometry	Patent 7495773 was granted and assigned to Zygo Corporation on February, 2009 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7495773	February 24, 2009
‌ US Patent 7456975 Methods and systems for interferometric analysis of surfaces and related applications	Patent 7456975 was granted and assigned to Zygo Corporation on November, 2008 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7456975	November 25, 2008
‌ US Patent 7046371 Interferometer having a coupled cavity geometry for use with an extended source	Patent 7046371 was granted and assigned to Zygo Corporation on May, 2006 by the United States Patent and Trademark Office.		Zygo Corporation	United States Patent and Trademark Office	7046371	May 16, 2006

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