List of MKS Instruments patents

Patents where

Current Assignee

Name

MKS Instruments

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7764140 Radio frequency power delivery system	Patent 7764140 was granted and assigned to MKS Instruments on July, 2010 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7764140	July 27, 2010
‌ US Patent 10546724 Pulsed, bidirectional radio frequency source/load	Patent 10546724 was granted and assigned to MKS Instruments on January, 2020 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	10546724	January 28, 2020
‌ US Patent 10049857 Adaptive periodic waveform controller	Patent 10049857 was granted and assigned to MKS Instruments on August, 2018 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	10049857	August 14, 2018
‌ US Patent 7777567 RF power amplifier stability network	Patent 7777567 was granted and assigned to MKS Instruments on August, 2010 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7777567	August 17, 2010
‌ US Patent 7389697 Pressure sensor for detecting small pressure differences and low pressures	Patent 7389697 was granted and assigned to MKS Instruments on June, 2008 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7389697	June 24, 2008
‌ US Patent 10229816 Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network	Patent 10229816 was granted and assigned to MKS Instruments on March, 2019 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	10229816	March 12, 2019
‌ US Patent 7622308 Process control using process data and yield data	Patent 7622308 was granted and assigned to MKS Instruments on November, 2009 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7622308	November 24, 2009
‌ US Patent 11513542 Method and apparatus for pulse gas delivery using an external pressure trigger	Patent 11513542 was granted and assigned to MKS Instruments on November, 2022 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	11513542	November 29, 2022
‌ US Patent 11573583 Pressure control using an external trigger	Patent 11573583 was granted and assigned to MKS Instruments on February, 2023 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	11573583	February 7, 2023
‌ US Patent 7962294 Integrated absolute and differential pressure transducer	Patent 7962294 was granted and assigned to MKS Instruments on June, 2011 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7962294	June 14, 2011
‌ US Patent 7621290 Gas delivery method and system including a flow ratio controller using antisymmetric optimal control	Patent 7621290 was granted and assigned to MKS Instruments on November, 2009 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7621290	November 24, 2009
‌ US Patent 11531312 Adaptive control for a power generator	Patent 11531312 was granted and assigned to MKS Instruments on December, 2022 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	11531312	December 20, 2022
‌ US Patent 11232931 Intermodulation distortion mitigation using electronic variable capacitor	Patent 11232931 was granted and assigned to MKS Instruments on January, 2022 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	11232931	January 25, 2022
‌ US Patent 8003936 Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer	Patent 8003936 was granted and assigned to MKS Instruments on August, 2011 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	8003936	August 23, 2011
‌ US Patent 10395895 Feedback control by RF waveform tailoring for ion energy distribution	Patent 10395895 was granted and assigned to MKS Instruments on August, 2019 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	10395895	August 27, 2019
‌ US Patent 8040068 Radio frequency power control system	Patent 8040068 was granted and assigned to MKS Instruments on October, 2011 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	8040068	October 18, 2011
‌ US Patent 7595887 Multigas monitoring and detection system	Patent 7595887 was granted and assigned to MKS Instruments on September, 2009 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7595887	September 29, 2009
‌ US Patent 8053700 Applicators and cooling systems for a plasma device	Patent 8053700 was granted and assigned to MKS Instruments on November, 2011 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	8053700	November 8, 2011
‌ US Patent 8710926 Radio frequency power delivery system	Patent 8710926 was granted and assigned to MKS Instruments on April, 2014 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	8710926	April 29, 2014
‌ US Patent 7428913 Valve assembly having articulating rigid seating surface	Patent 7428913 was granted and assigned to MKS Instruments on September, 2008 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7428913	September 30, 2008
‌ US Patent 11042140 Adaptive control for a power generator	Patent 11042140 was granted and assigned to MKS Instruments on June, 2021 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	11042140	June 22, 2021
‌ US Patent 9714919 Trace gas concentration in ART MS traps	Patent 9714919 was granted and assigned to MKS Instruments on July, 2017 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	9714919	July 25, 2017
‌ US Patent 9595930 Solid state microwave generator and power amplifier	Patent 9595930 was granted and assigned to MKS Instruments on March, 2017 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	9595930	March 14, 2017
‌ US Patent 7891228 Dual-mode mass flow verification and mass flow delivery system and method	Patent 7891228 was granted and assigned to MKS Instruments on February, 2011 by the United States Patent and Trademark Office.		MKS Instruments	United States Patent and Trademark Office	7891228	February 22, 2011
‌ US Patent 9947514 Plasma RF bias cancellation system	Patent 9947514 was granted and assigned to MKS Instruments on April, 2018 by the United States Patent and Trademark Office.	MKS Instruments	MKS Instruments	United States Patent and Trademark Office	9947514	April 17, 2018

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