List of Lam Research patents

Patents where

Current Assignee

Name

Lam Research

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 10347547 Suppressing interfacial reactions by varying the wafer temperature throughout deposition	Patent 10347547 was granted and assigned to Lam Research on July, 2019 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10347547	July 9, 2019
‌ US Patent 10177024 High temperature substrate pedestal module and components thereof	Patent 10177024 was granted and assigned to Lam Research on January, 2019 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10177024	January 8, 2019
‌ US Patent 7173418 Methods and apparatus for optimizing an electrical response to a set of conductive layers on a substrate	Patent 7173418 was granted and assigned to Lam Research on February, 2007 by the United States Patent and Trademark Office.		Lam Research	United States Patent and Trademark Office	7173418	February 6, 2007
‌ US Patent 7096819 Inductive plasma processor having coil with plural windings and method of controlling plasma density	Patent 7096819 was granted and assigned to Lam Research on August, 2006 by the United States Patent and Trademark Office.		Lam Research	United States Patent and Trademark Office	7096819	August 29, 2006
‌ US Patent 10062599 Automated replacement of consumable parts using interfacing chambers	Patent 10062599 was granted and assigned to Lam Research on August, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10062599	August 28, 2018
‌ US Patent 9881820 Front opening ring pod	Patent 9881820 was granted and assigned to Lam Research on January, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	9881820	January 30, 2018
‌ US Patent 11704463 Method of etch model calibration using optical scatterometry	Patent 11704463 was granted and assigned to Lam Research on July, 2023 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	11704463	July 18, 2023
‌ US Patent 10124492 Automated replacement of consumable parts using end effectors interfacing with plasma processing system	Patent 10124492 was granted and assigned to Lam Research on November, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10124492	November 13, 2018
‌ US Patent 11365479 Ex situ coating of chamber components for semiconductor processing	Patent 11365479 was granted and assigned to Lam Research on June, 2022 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	11365479	June 21, 2022
‌ US Patent 11441222 PECVD deposition system for deposition on selective side of the substrate	Patent 11441222 was granted and assigned to Lam Research on September, 2022 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	11441222	September 13, 2022
‌ US Patent 10062590 Front opening ring pod	Patent 10062590 was granted and assigned to Lam Research on August, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10062590	August 28, 2018
‌ US Patent 10062589 Front opening ring pod	Patent 10062589 was granted and assigned to Lam Research on August, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10062589	August 28, 2018
‌ US Patent 10121689 Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing	Patent 10121689 was granted and assigned to Lam Research on November, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10121689	November 6, 2018
‌ US Patent 11621150 Mechanical suppression of parasitic plasma in substrate processing chamber	Patent 11621150 was granted and assigned to Lam Research on April, 2023 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	11621150	April 4, 2023
‌ US Patent 11761079 Oxidation resistant protective layer in chamber conditioning	Patent 11761079 was granted and assigned to Lam Research on September, 2023 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	11761079	September 19, 2023
‌ US Patent 10354857 High power low pressure UV bulb with plasma resistant coating	Patent 10354857 was granted and assigned to Lam Research on July, 2019 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10354857	July 16, 2019
‌ US Patent 9101038 Electrostatic chuck including declamping electrode and method of declamping	Patent 9101038 was granted and assigned to Lam Research on August, 2015 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	9101038	August 4, 2015
‌ US Patent 10304717 Automated replacement of consumable parts using interfacing chambers	Patent 10304717 was granted and assigned to Lam Research on May, 2019 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10304717	May 28, 2019
‌ US Patent 9051647 Tunable multi-zone gas injection system	Patent 9051647 was granted and assigned to Lam Research on June, 2015 by the United States Patent and Trademark Office.		Lam Research	United States Patent and Trademark Office	9051647	June 9, 2015
‌ US Patent 10262910 Method of feature exaction from time-series of spectra to control endpoint of process	Patent 10262910 was granted and assigned to Lam Research on April, 2019 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10262910	April 16, 2019
‌ US Patent 11784047 Tin oxide thin film spacers in semiconductor device manufacturing	Patent 11784047 was granted and assigned to Lam Research on October, 2023 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	11784047	October 10, 2023
‌ US Patent 7708859 Gas distribution system having fast gas switching capabilities	Patent 7708859 was granted and assigned to Lam Research on May, 2010 by the United States Patent and Trademark Office.		Lam Research	United States Patent and Trademark Office	7708859	May 4, 2010
‌ US Patent 8202393 Alternate gas delivery and evacuation system for plasma processing apparatuses	Patent 8202393 was granted and assigned to Lam Research on June, 2012 by the United States Patent and Trademark Office.		Lam Research	United States Patent and Trademark Office	8202393	June 19, 2012
‌ US Patent 8154209 Modulated multi-frequency processing method	Patent 8154209 was granted and assigned to Lam Research on April, 2012 by the United States Patent and Trademark Office.		Lam Research	United States Patent and Trademark Office	8154209	April 10, 2012
‌ US Patent 10032681 Etch metric sensitivity for endpoint detection	Patent 10032681 was granted and assigned to Lam Research on July, 2018 by the United States Patent and Trademark Office.	Lam Research	Lam Research	United States Patent and Trademark Office	10032681	July 24, 2018

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