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Name
Description
Patent Applicant
Current Assignee
Inventor
Patent Jurisdiction
Patent Number
Date of Patent
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US Patent 10062585 Oxygen compatible plasma source

Patent 10062585 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10062585
August 28, 2018
‌
US Patent 10062579 Selective SiN lateral recess

Patent 10062579 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10062579
August 28, 2018
‌
US Patent 10049891 Selective in situ cobalt residue removal

Patent 10049891 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10049891
August 14, 2018
‌
US Patent 10062578 Methods for etch of metal and metal-oxide films

Patent 10062578 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10062578
August 28, 2018
‌
US Patent 10043674 Germanium etching systems and methods

Patent 10043674 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10043674
August 7, 2018
‌
US Patent 10026621 SiN spacer profile patterning

Patent 10026621 was granted and assigned to Applied Materials on July, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10026621
July 17, 2018
‌
US Patent 10032606 Semiconductor processing with DC assisted RF power for improved control

Patent 10032606 was granted and assigned to Applied Materials on July, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10032606
July 24, 2018
‌
US Patent 10121671 Methods of depositing metal films using metal oxyhalide precursors

Patent 10121671 was granted and assigned to Applied Materials on November, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10121671
November 6, 2018
‌
US Patent 10062587 Pedestal with multi-zone temperature control and multiple purge capabilities

Patent 10062587 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10062587
August 28, 2018
‌
US Patent 10043684 Self-limiting atomic thermal etching systems and methods

Patent 10043684 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10043684
August 7, 2018
‌
US Patent 6887353 Tailored barrier layer which provides improved copper interconnect electromigration resistance

Patent 6887353 was granted and assigned to Applied Materials on May, 2005 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
6887353
May 3, 2005
‌
US Patent 10147620 Bolted wafer chuck thermal management systems and methods for wafer processing systems

Patent 10147620 was granted and assigned to Applied Materials on December, 2018 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10147620
December 4, 2018
‌
US Patent 10319739 Accommodating imperfectly aligned memory holes

Patent 10319739 was granted and assigned to Applied Materials on June, 2019 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10319739
June 11, 2019
‌
US Patent 11495470 Method of enhancing etching selectivity using a pulsed plasma

Patent 11495470 was granted and assigned to Applied Materials on November, 2022 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
11495470
November 8, 2022
‌
US Patent 6916398 Gas delivery apparatus and method for atomic layer deposition

Patent 6916398 was granted and assigned to Applied Materials on July, 2005 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
6916398
July 12, 2005
‌
US Patent 7089782 Polishing head test station

Patent 7089782 was granted and assigned to Applied Materials on August, 2006 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
7089782
August 15, 2006
‌
US Patent 11471999 Integrated abrasive polishing pads and manufacturing methods

Patent 11471999 was granted and assigned to Applied Materials on October, 2022 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
11471999
October 18, 2022
‌
US Patent 10190701 Corrosion control for chamber components

Patent 10190701 was granted and assigned to Applied Materials on January, 2019 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10190701
January 29, 2019
‌
US Patent 7374393 Method of retaining a substrate during a substrate transferring process

Patent 7374393 was granted and assigned to Applied Materials on May, 2008 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
7374393
May 20, 2008
‌
US Patent 11676832 Laser ablation system for package fabrication

Patent 11676832 was granted and assigned to Applied Materials on June, 2023 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
11676832
June 13, 2023
‌
US Patent 10373804 System for tunable workpiece biasing in a plasma reactor

Patent 10373804 was granted and assigned to Applied Materials on August, 2019 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
10373804
August 6, 2019
‌
US Patent 11446788 Precursor formulations for polishing pads produced by an additive manufacturing process

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
11446788
September 20, 2022
‌
US Patent 11462389 Pulsed-voltage hardware assembly for use in a plasma processing system

Patent 11462389 was granted and assigned to Applied Materials on October, 2022 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
11462389
October 4, 2022
‌
US Patent 8083853 Plasma uniformity control by gas diffuser hole design

Patent 8083853 was granted and assigned to Applied Materials on December, 2011 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
8083853
December 27, 2011
‌
US Patent 11594428 Low temperature chuck for plasma processing systems

Patent 11594428 was granted and assigned to Applied Materials on February, 2023 by the United States Patent and Trademark Office.

Applied Materials
Applied Materials
Applied Materials
Applied Materials
United States Patent and Trademark Office
United States Patent and Trademark Office
11594428
February 28, 2023
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