List of ASML Holding patents

Patents where

Current Assignee

Name

ASML Holding

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7199862 Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system	Patent 7199862 was granted and assigned to ASML Holding on April, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7199862	April 3, 2007
‌ US Patent 7255975 Yield and line width performance for liquid polymers and other materials	Patent 7255975 was granted and assigned to ASML Holding on August, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7255975	August 14, 2007
‌ US Patent 7208262 Yield and line width performance for liquid polymers and other materials	Patent 7208262 was granted and assigned to ASML Holding on April, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7208262	April 24, 2007
‌ US Patent 7401931 Apparatus for optical beam shaping and associated methods	Patent 7401931 was granted and assigned to ASML Holding on July, 2008 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7401931	July 22, 2008
‌ US Patent 7199929 Methods for optical beam shaping and diffusing	Patent 7199929 was granted and assigned to ASML Holding on April, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7199929	April 3, 2007
‌ US Patent 11422478 Control of reticle placement for defectivity optimization		ASML Holding	ASML Holding	United States Patent and Trademark Office	11422478	August 23, 2022
‌ US Patent 7317583 High numerical aperture projection system and method for microlithography	Patent 7317583 was granted and assigned to ASML Holding on January, 2008 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7317583	January 8, 2008
‌ US Patent 7342701 Multiple illumination source exposure apparatus	Patent 7342701 was granted and assigned to ASML Holding on March, 2008 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7342701	March 11, 2008
‌ US Patent 7105836 Method and apparatus for cooling a reticle during lithographic exposure	Patent 7105836 was granted and assigned to ASML Holding on September, 2006 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7105836	September 12, 2006
‌ US Patent 10082740 Feedback control system of an alignment system	Patent 10082740 was granted and assigned to ASML Holding on September, 2018 by the United States Patent and Trademark Office.	ASML Holding	ASML Holding	United States Patent and Trademark Office	10082740	September 25, 2018
‌ US Patent 7249925 System and method for reticle protection and transport	Patent 7249925 was granted and assigned to ASML Holding on July, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7249925	July 31, 2007
‌ US Patent 7389155 Method and system for improved trajectory planning and execution	Patent 7389155 was granted and assigned to ASML Holding on June, 2008 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7389155	June 17, 2008
‌ US Patent 7134321 Fluid gauge proximity sensor and method of operating same using a modulated fluid flow	Patent 7134321 was granted and assigned to ASML Holding on November, 2006 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7134321	November 14, 2006
‌ US Patent 7227613 Lithographic apparatus having double telecentric illumination	Patent 7227613 was granted and assigned to ASML Holding on June, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7227613	June 5, 2007
‌ US Patent 7239446 Optical reduction system with control of illumination polarization	Patent 7239446 was granted and assigned to ASML Holding on July, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7239446	July 3, 2007
‌ US Patent 7372548 Levitated reticle-masking blade stage	Patent 7372548 was granted and assigned to ASML Holding on May, 2008 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7372548	May 13, 2008
‌ US Patent 6862817 Method and apparatus for kinematic registration of a reticle	Patent 6862817 was granted and assigned to ASML Holding on March, 2005 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	6862817	March 8, 2005
‌ US Patent 6950175 System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism	Patent 6950175 was granted and assigned to ASML Holding on September, 2005 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	6950175	September 27, 2005
‌ US Patent 7542263 Overlay correction by reducing wafer slipping after alignment	Patent 7542263 was granted and assigned to ASML Holding on June, 2009 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7542263	June 2, 2009
‌ US Patent 11537055 Lithographic apparatus, metrology apparatus, optical system and method	Patent 11537055 was granted and assigned to ASML Holding on December, 2022 by the United States Patent and Trademark Office.	ASML Holding	ASML Holding	United States Patent and Trademark Office	11537055	December 27, 2022
‌ US Patent 11513446 Adaptive alignment	Patent 11513446 was granted and assigned to ASML Holding on November, 2022 by the United States Patent and Trademark Office.	ASML Holding	ASML Holding	United States Patent and Trademark Office	11513446	November 29, 2022
‌ US Patent 7135693 Method and apparatus for recycling gases used in a lithography tool	Patent 7135693 was granted and assigned to ASML Holding on November, 2006 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7135693	November 14, 2006
‌ US Patent 7426034 Refractive index sensor utilizing gold island surface plasmon resonance on optical fiber	Patent 7426034 was granted and assigned to ASML Holding on September, 2008 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7426034	September 16, 2008
‌ US Patent 7253888 Refractive index sensor utilizing gold island surface plasmon resonance on optical fiber	Patent 7253888 was granted and assigned to ASML Holding on August, 2007 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7253888	August 7, 2007
‌ US Patent 7136214 Active faceted mirror system for lithography	Patent 7136214 was granted and assigned to ASML Holding on November, 2006 by the United States Patent and Trademark Office.		ASML Holding	United States Patent and Trademark Office	7136214	November 14, 2006

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