List of Tegal Corporation patents

Patents where

Current Assignee

Name

‌

Tegal Corporation

Name	Description	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7179350 Reactive sputtering of silicon nitride films by RF supported DC magnetron	Patent 7179350 was granted and assigned to Tegal Corporation on February, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7179350	February 20, 2007
‌ US Patent 7270729 System for, and method of, etching a surface on a wafer	Patent 7270729 was granted and assigned to Tegal Corporation on September, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7270729	September 18, 2007
‌ US Patent 6858085 Two-compartment chamber for sequential processing	Patent 6858085 was granted and assigned to Tegal Corporation on February, 2005 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	6858085	February 22, 2005
‌ US Patent 7169623 System and method for processing a wafer including stop-on-aluminum processing	Patent 7169623 was granted and assigned to Tegal Corporation on January, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7169623	January 30, 2007
‌ US Patent 7361387 Plasma enhanced pulsed layer deposition	Patent 7361387 was granted and assigned to Tegal Corporation on April, 2008 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7361387	April 22, 2008
‌ US Patent 7425224 High pressure chemical vapor trapping method	Patent 7425224 was granted and assigned to Tegal Corporation on September, 2008 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7425224	September 16, 2008
‌ US Patent 7235484 Nanolayer thick film processing system and method	Patent 7235484 was granted and assigned to Tegal Corporation on June, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7235484	June 26, 2007
‌ US Patent 7087522 Multilayer copper structure for improving adhesion property	Patent 7087522 was granted and assigned to Tegal Corporation on August, 2006 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7087522	August 8, 2006
‌ US Patent 7153542 Assembly line processing method	Patent 7153542 was granted and assigned to Tegal Corporation on December, 2006 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7153542	December 26, 2006
‌ US Patent 7439188 Reactor with heated and textured electrodes and surfaces	Patent 7439188 was granted and assigned to Tegal Corporation on October, 2008 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7439188	October 21, 2008
‌ US Patent 7867905 System and method for semiconductor processing	Patent 7867905 was granted and assigned to Tegal Corporation on January, 2011 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7867905	January 11, 2011
‌ US Patent 7645618 Dry etch stop process for eliminating electrical shorting in MRAM device structures	Patent 7645618 was granted and assigned to Tegal Corporation on January, 2010 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7645618	January 12, 2010
‌ US Patent 7163721 Method to plasma deposit on organic polymer dielectric film	Patent 7163721 was granted and assigned to Tegal Corporation on January, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7163721	January 16, 2007
‌ US Patent 7115169 Replaceable shielding apparatus	Patent 7115169 was granted and assigned to Tegal Corporation on October, 2006 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7115169	October 3, 2006
‌ US Patent 7467598 System for, and method of, etching a surface on a wafer	Patent 7467598 was granted and assigned to Tegal Corporation on December, 2008 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7467598	December 23, 2008
‌ US Patent 7678705 Plasma semiconductor processing system and method	Patent 7678705 was granted and assigned to Tegal Corporation on March, 2010 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7678705	March 16, 2010
‌ US Patent 7223699 Plasma etch reactor and method	Patent 7223699 was granted and assigned to Tegal Corporation on May, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7223699	May 29, 2007
‌ US Patent 7442615 Semiconductor processing system and method	Patent 7442615 was granted and assigned to Tegal Corporation on October, 2008 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7442615	October 28, 2008
‌ US Patent 7208396 Permanent adherence of the back end of a wafer to an electrical component or sub-assembly	Patent 7208396 was granted and assigned to Tegal Corporation on April, 2007 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7208396	April 24, 2007
‌ US Patent 6919101 Method to deposit an impermeable film on porous low-k dielectric film	Patent 6919101 was granted and assigned to Tegal Corporation on July, 2005 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	6919101	July 19, 2005
‌ US Patent 6921555 Method and system for sequential processing in a two-compartment chamber	Patent 6921555 was granted and assigned to Tegal Corporation on July, 2005 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	6921555	July 26, 2005
‌ US Patent 7049549 Multi-thermal zone shielding apparatus	Patent 7049549 was granted and assigned to Tegal Corporation on May, 2006 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7049549	May 23, 2006
‌ US Patent 6859262 Redistributing radiation guide	Patent 6859262 was granted and assigned to Tegal Corporation on February, 2005 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	6859262	February 22, 2005
‌ US Patent 7074278 Removable lid and floating pivot	Patent 7074278 was granted and assigned to Tegal Corporation on July, 2006 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	7074278	July 11, 2006
‌ US Patent 6998097 High pressure chemical vapor trapping system	Patent 6998097 was granted and assigned to Tegal Corporation on February, 2006 by the United States Patent and Trademark Office.	‌ Tegal Corporation	United States Patent and Trademark Office	6998097	February 14, 2006

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