List of SBIR/STTR awards granted to LumArray, Inc.

where

SBIR/STTR Award Recipient

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LumArray, Inc.

Name	Description	SBIR/STTR Award Recipient	Government Agency	Award Type	Contract Number (US Government)	Award Phase	Award Amount (USD)	Date Awarded	Official Website
‌ LumArray, Inc. SBIR Phase I Award, February 2022	A SBIR Phase I contract was awarded to LumArray, Inc. in February, 2022 for $199,996.0 USD from the U.S. Department of Energy.	‌ LumArray, Inc.	U.S. Department of Energy	SBIR	DE-SC0022496	Phase I	199,996	February 14, 2022	sbir.gov/node/2233013
‌ LumArray, Inc. SBIR Phase I Award, December 2015	A SBIR Phase I contract was awarded to LumArray, Inc. in December, 2015 for $149,838.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	HDTRA1-16-P-0009	Phase I	149,838	December 8, 2015	sbir.gov/node/1250961
‌ LumArray, Inc. SBIR Phase I Award, March 2007	A SBIR Phase I contract was awarded to LumArray, Inc. in March, 2007 for $149,965.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	N68335-07-C-0217	Phase I	149,965	March 15, 2007	sbir.gov/content/zone-plate-array-lithography-mask-making-and-military-integrated-circuit-ic-manufacturing-0
‌ LumArray, Inc. SBIR Phase II Award, June 2010	A SBIR Phase II contract was awarded to LumArray, Inc. in June, 2010 for $1,559,220.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	W91CRB-10-C-0113	Phase II	1,559,220	June 22, 2010	sbir.gov/node/667080
‌ LumArray, Inc. SBIR Phase I Award, January 2004	A SBIR Phase I contract was awarded to LumArray, Inc. in January, 2004 for $42,150.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	W31P4Q-04-C-R109	Phase I	42,150	January 13, 2004	sbir.gov/content/maskless-lithography-fabrication-microelectronics-100-nm-features-2
‌ LumArray, Inc. SBIR Phase II Award, April 2005	A SBIR Phase II contract was awarded to LumArray, Inc. in April, 2005 for $1,649,230.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	W31P4Q-05-C-R156	Phase II	1,649,230	April 11, 2005	sbir.gov/content/maskless-lithography-fabrication-microelectronics-100-nm-features-0
‌ LumArray, Inc. SBIR Phase II Award, February 2014	A SBIR Phase II contract was awarded to LumArray, Inc. in February, 2014 for $999,633.0 USD from the U.S. Department of Energy.	‌ LumArray, Inc.	U.S. Department of Energy	SBIR	DE-SC0011405	Phase II	999,633	February 18, 2014	sbir.gov/content/direct-writing-x-ray-gratings-using-zone-plate-array-lithography-1
‌ LumArray, Inc. SBIR Phase II Award, April 2017	A SBIR Phase II contract was awarded to LumArray, Inc. in April, 2017 for $999,921.0 USD from the U.S. Department of Energy.	‌ LumArray, Inc.	U.S. Department of Energy	SBIR	DE-SC0011405	Phase II	999,921	April 10, 2017	sbir.gov/node/1310405
‌ LumArray, Inc. SBIR Phase I Award, February 2014	A SBIR Phase I contract was awarded to LumArray, Inc. in February, 2014 for $149,967.0 USD from the U.S. Department of Energy.	‌ LumArray, Inc.	U.S. Department of Energy	SBIR	DE-SC0011405	Phase I	149,967	February 18, 2014	sbir.gov/content/direct-writing-x-ray-gratings-using-zone-plate-array-lithography
‌ LumArray, Inc. SBIR Phase I Award, September 2017	A SBIR Phase I contract was awarded to LumArray, Inc. in September, 2017 for $149,987.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	FA9550-17-P-0013	Phase I	149,987	September 15, 2017	sbir.gov/node/1486467
‌ LumArray, Inc. SBIR Phase II Award, July 2008	A SBIR Phase II contract was awarded to LumArray, Inc. in July, 2008 for $1,781,790.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	N68335-08-C-0212	Phase II	1,781,790	July 22, 2008	sbir.gov/content/zone-plate-array-lithography-mask-making-and-military-integrated-circuit-ic-manufacturing-2
‌ LumArray, Inc. STTR Phase II Award, September 2012	A STTR Phase II contract was awarded to LumArray, Inc. in September, 2012 for $749,934.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	STTR	FA9550-12-C-0082	Phase II	749,934	September 20, 2012	sbir.gov/content/flexible-micro-and-nano-patterning-tools-photonics-0
‌ LumArray, Inc. SBIR Phase II Award, February 2011	A SBIR Phase II contract was awarded to LumArray, Inc. in February, 2011 for $499,868.0 USD from the National Science Foundation.	‌ LumArray, Inc.	National Science Foundation	SBIR	1058417	Phase II	499,868	February 1, 2011	sbir.gov/content/sbir-phase-ii-nanometer-level-fidelity-maskless-lithography
‌ LumArray, Inc. STTR Phase I Award, June 2011	A STTR Phase I contract was awarded to LumArray, Inc. in June, 2011 for $99,916.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	STTR	FA9550-11-C-0044	Phase I	99,916	June 15, 2011	sbir.gov/node/377886
‌ LumArray, Inc. SBIR Phase II Award,	A SBIR Phase II contract was awarded to LumArray, Inc. for $750,000.0 USD from the U.S. Department of Defense.	‌ LumArray, Inc.	U.S. Department of Defense	SBIR	W91CRB-10-C-0113	Phase II	750,000		sbir.gov/node/6781
‌ LumArray, Inc. SBIR Phase II Award,	A SBIR Phase II contract was awarded to LumArray, Inc. for $499,943.0 USD from the National Science Foundation.	‌ LumArray, Inc.	National Science Foundation	SBIR	0620456	Phase II	499,943		sbir.gov/content/sbir-phase-ii-optical-maskless-lithography-equipment-0
‌ LumArray, Inc. SBIR Phase I Award,	A SBIR Phase I contract was awarded to LumArray, Inc. for $99,964.0 USD from the National Science Foundation.	‌ LumArray, Inc.	National Science Foundation	SBIR	0912420	Phase I	99,964		sbir.gov/content/sbir-phase-i-nanometer-level-fidelity-maskless-lithography-0
‌ LumArray, Inc. SBIR Phase I Award,	A SBIR Phase I contract was awarded to LumArray, Inc. for $99,999.0 USD from the National Science Foundation.	‌ LumArray, Inc.	National Science Foundation	SBIR	0740100	Phase I	99,999		sbir.gov/content/sbir-phase-i-dual-wavelength-diffractive-optics-absorbance-modulation-optical-lithography-0
‌ LumArray, Inc. SBIR Phase II Award,	A SBIR Phase II contract was awarded to LumArray, Inc. for $468,979.0 USD from the National Science Foundation.	‌ LumArray, Inc.	National Science Foundation	SBIR	0923893	Phase II	468,979		sbir.gov/content/sbir-phase-ii-dual-wavelength-diffractive-optics-absorbance-modulation-optical-lithography-0
‌ LumArray, Inc. SBIR Phase I Award,	A SBIR Phase I contract was awarded to LumArray, Inc. for $99,924.0 USD from the National Science Foundation.	‌ LumArray, Inc.	National Science Foundation	SBIR	0512402	Phase I	99,924		sbir.gov/content/sbir-phase-i-optical-maskless-lithography-equipment-0

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