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List of Gigaphoton Inc patents

List of Gigaphoton Inc patents
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Patents where
Current Assignee
Name
is
Gigaphoton IncGigaphoton Inc
Name
Description
Patent Applicant
Current Assignee
Inventor
Patent Jurisdiction
Patent Number
Date of Patent
‌
US Patent 7965756 Optical element for gas laser and gas laser apparatus using the same

Patent 7965756 was granted and assigned to Gigaphoton Inc on June, 2011 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
7965756
June 21, 2011
‌
US Patent 9570884 Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light

Patent 9570884 was granted and assigned to Gigaphoton Inc on February, 2017 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
9570884
February 14, 2017
‌
US Patent 8492738 Apparatus for and method of withdrawing ions in EUV light production apparatus

Patent 8492738 was granted and assigned to Gigaphoton Inc on July, 2013 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8492738
July 23, 2013
‌
US Patent 8481984 Extreme ultra violet light source apparatus

Patent 8481984 was granted and assigned to Gigaphoton Inc on July, 2013 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8481984
July 9, 2013
‌
US Patent 8256441 Method for cleaning optical element of EUV light source device and optical element cleaning device

Patent 8256441 was granted and assigned to Gigaphoton Inc on September, 2012 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8256441
September 4, 2012
‌
US Patent 8634441 Master oscillator, laser system, and laser light generation method

Patent 8634441 was granted and assigned to Gigaphoton Inc on January, 2014 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8634441
January 21, 2014
‌
US Patent 9407052 Amplifier, laser apparatus, and extreme ultraviolet light generation system

Patent 9407052 was granted and assigned to Gigaphoton Inc on August, 2016 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
9407052
August 2, 2016
‌
US Patent 9680277 Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier

Patent 9680277 was granted and assigned to Gigaphoton Inc on June, 2017 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
9680277
June 13, 2017
‌
US Patent 8258492 Differential evacuation system

Patent 8258492 was granted and assigned to Gigaphoton Inc on September, 2012 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8258492
September 4, 2012
‌
US Patent 11126095 Extreme ultraviolet light generation device and electronic device manufacturing method

Patent 11126095 was granted and assigned to Gigaphoton Inc on September, 2021 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
11126095
September 21, 2021
‌
US Patent 9093814 Optical device, and laser chamber and gas laser apparatus using the same

Patent 9093814 was granted and assigned to Gigaphoton Inc on July, 2015 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
9093814
July 28, 2015
‌
US Patent 11125613 Extreme ultraviolet light sensor unit and extreme ultraviolet light generation apparatus

Patent 11125613 was granted and assigned to Gigaphoton Inc on September, 2021 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
11125613
September 21, 2021
‌
US Patent 8817838 Laser device with optical element module on separate plate

Patent 8817838 was granted and assigned to Gigaphoton Inc on August, 2014 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8817838
August 26, 2014
‌
US Patent 9837779 Laser apparatus and laser apparatus manufacturing method

Patent 9837779 was granted and assigned to Gigaphoton Inc on December, 2017 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
9837779
December 5, 2017
‌
US Patent 11119421 Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Patent 11119421 was granted and assigned to Gigaphoton Inc on September, 2021 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
11119421
September 14, 2021
‌
US Patent 11162530 Gas laser apparatus and magnetic bearing control method

Patent 11162530 was granted and assigned to Gigaphoton Inc on November, 2021 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
11162530
November 2, 2021
‌
US Patent 8288743 Apparatus for and method of withdrawing ions in EUV light production apparatus

Patent 8288743 was granted and assigned to Gigaphoton Inc on October, 2012 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8288743
October 16, 2012
‌
US Patent 8514899 Laser system and laser light generation method

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8514899
August 20, 2013
‌
US Patent 8536550 Method and apparatus for cleaning collector mirror in EUV light generator

Patent 8536550 was granted and assigned to Gigaphoton Inc on September, 2013 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8536550
September 17, 2013
‌
US Patent 8536551 Extreme ultra violet light source apparatus

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8536551
September 17, 2013
‌
US Patent 8611393 Laser apparatus

Patent 8611393 was granted and assigned to Gigaphoton Inc on December, 2013 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
8611393
December 17, 2013
‌
US Patent 11837839 Optical pulse stretcher, laser device, and electronic device manufacturing method

Patent 11837839 was granted and assigned to Gigaphoton Inc on December, 2023 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
11837839
December 5, 2023
‌
US Patent 12105426 Line narrowed gas laser apparatus, control method therefor, electronic device manufacturing method

Patent 12105426 was granted and assigned to Gigaphoton Inc on October, 2024 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
12105426
October 1, 2024
‌
US Patent 11924955 Extreme ultraviolet light generation apparatus and electronic device manufacturing method

Patent 11924955 was granted and assigned to Gigaphoton Inc on March, 2024 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
11924955
March 5, 2024
‌
US Patent 12076815 Laser processing apparatus and method for processing workpiece

Patent 12076815 was granted and assigned to Gigaphoton Inc on September, 2024 by the United States Patent and Trademark Office.

Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
Gigaphoton Inc
United States Patent and Trademark Office
United States Patent and Trademark Office
12076815
September 3, 2024
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