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List of Edwards Vacuum patents

Patents where

Current Assignee

Name

Edwards Vacuum

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7541061 Vacuum chamber load lock structure and article transport mechanism	Patent 7541061 was granted and assigned to Edwards Vacuum on June, 2009 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7541061	June 2, 2009
‌ US Patent 11415263 Conversion kit for a support frame, a support frame and an integrated vacuum system mounted in a support frame	Patent 11415263 was granted and assigned to Edwards Vacuum on August, 2022 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	11415263	August 16, 2022
‌ US Patent 11175075 Systems and methods for warming a cryogenic heat exchanger array, for compact and efficient refrigeration, and for adaptive power management	Patent 11175075 was granted and assigned to Edwards Vacuum on November, 2021 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	11175075	November 16, 2021
‌ US Patent 7398127 Systems and methods for facilitating wireless communication between various components of a distributed system	Patent 7398127 was granted and assigned to Edwards Vacuum on July, 2008 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7398127	July 8, 2008
‌ US Patent 9888526 Detecting heater failure in a group of electric heaters in a process equipment heating system	Patent 9888526 was granted and assigned to Edwards Vacuum on February, 2018 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	9888526	February 6, 2018
‌ US Patent 7438534 Wide range pressure control using turbo pump	Patent 7438534 was granted and assigned to Edwards Vacuum on October, 2008 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7438534	October 21, 2008
‌ US Patent 10900699 Helium management control system	Patent 10900699 was granted and assigned to Edwards Vacuum on January, 2021 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10900699	January 26, 2021
‌ US Patent 11209193 Pneumatic drive cryocooler	Patent 11209193 was granted and assigned to Edwards Vacuum on December, 2021 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	11209193	December 28, 2021
‌ US Patent 10550829 Ion trajectory manipulation architecture in an ion pump	Patent 10550829 was granted and assigned to Edwards Vacuum on February, 2020 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10550829	February 4, 2020
‌ US Patent D944070 Clamp	Patent D944070 was granted and assigned to Edwards Vacuum on February, 2022 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	D944070	February 22, 2022
‌ US Patent 7500822 Combined vacuum pump load-lock assembly	Patent 7500822 was granted and assigned to Edwards Vacuum on March, 2009 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7500822	March 10, 2009
‌ US Patent 7470413 Fluorine removal by ion exchange	Patent 7470413 was granted and assigned to Edwards Vacuum on December, 2008 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7470413	December 30, 2008
‌ US Patent 10845229 Monitoring system and method	Patent 10845229 was granted and assigned to Edwards Vacuum on November, 2020 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10845229	November 24, 2020
‌ US Patent 7539459 Active noise cancellation system, arrangement, and method	Patent 7539459 was granted and assigned to Edwards Vacuum on May, 2009 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7539459	May 26, 2009
‌ US Patent 7404698 Turbomolecular pump with static charge control	Patent 7404698 was granted and assigned to Edwards Vacuum on July, 2008 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7404698	July 29, 2008
‌ US Patent 8636019 In-situ removal of semiconductor process residues from dry pump surfaces	Patent 8636019 was granted and assigned to Edwards Vacuum on January, 2014 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	8636019	January 28, 2014
‌ US Patent 7625540 Fluorine removal by ion exchange	Patent 7625540 was granted and assigned to Edwards Vacuum on December, 2009 by the United States Patent and Trademark Office.		Edwards Vacuum	United States Patent and Trademark Office	7625540	December 1, 2009
‌ US Patent 11215384 System and method for cryogenic cooling	Patent 11215384 was granted and assigned to Edwards Vacuum on January, 2022 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	11215384	January 4, 2022
‌ US Patent 10632399 Multi-refrigerator high speed cryopump		Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10632399	April 28, 2020
‌ US Patent 10495079 Cryopump hybrid frontal array	Patent 10495079 was granted and assigned to Edwards Vacuum on December, 2019 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10495079	December 3, 2019
‌ US Patent 10121627 Ion pump noble gas stability using small grain sized cathode material	Patent 10121627 was granted and assigned to Edwards Vacuum on November, 2018 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10121627	November 6, 2018
‌ US Patent 10760562 Pressure burst free high capacity cryopump			Edwards Vacuum	United States Patent and Trademark Office	10760562	September 1, 2020
‌ US Patent 10184689 Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted	Patent 10184689 was granted and assigned to Edwards Vacuum on January, 2019 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	10184689	January 22, 2019
‌ US Patent 11931682 Waste gas abatement technology for semiconductor processing	Patent 11931682 was granted and assigned to Edwards Vacuum on March, 2024 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	11931682	March 19, 2024
‌ US Patent 12014913 Reducing plasma formation in an ion pump	Patent 12014913 was granted and assigned to Edwards Vacuum on June, 2024 by the United States Patent and Trademark Office.	Edwards Vacuum	Edwards Vacuum	United States Patent and Trademark Office	12014913	June 18, 2024

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