List of Axcelis Technologies patents

Patents where

Current Assignee

Name

Axcelis Technologies

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7598495 Methods and systems for trapping ion beam particles and focusing an ion beam	Patent 7598495 was granted and assigned to Axcelis Technologies on October, 2009 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7598495	October 6, 2009
‌ US Patent 8422193 Annulus clamping and backside gas cooled electrostatic chuck	Patent 8422193 was granted and assigned to Axcelis Technologies on April, 2013 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	8422193	April 16, 2013
‌ US Patent 9378992 High throughput heated ion implantation system and method	Patent 9378992 was granted and assigned to Axcelis Technologies on June, 2016 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	9378992	June 28, 2016
‌ US Patent 7449416 Apparatus and plasma ashing process for increasing photoresist removal rate	Patent 7449416 was granted and assigned to Axcelis Technologies on November, 2008 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7449416	November 11, 2008
‌ US Patent 7381969 Load lock control	Patent 7381969 was granted and assigned to Axcelis Technologies on June, 2008 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7381969	June 3, 2008
‌ US Patent 10573541 System for semiconductor wafer retention and sensing in a vacuum load lock	Patent 10573541 was granted and assigned to Axcelis Technologies on February, 2020 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	10573541	February 25, 2020
‌ US Patent 11646175 Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control	Patent 11646175 was granted and assigned to Axcelis Technologies on May, 2023 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	11646175	May 9, 2023
‌ US Patent 7112808 Wafer 2D scan mechanism	Patent 7112808 was granted and assigned to Axcelis Technologies on September, 2006 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7112808	September 26, 2006
‌ US Patent 7037846 Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing	Patent 7037846 was granted and assigned to Axcelis Technologies on May, 2006 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7037846	May 2, 2006
‌ US Patent 9281227 Multi-resistivity Johnsen-Rahbek electrostatic clamp	Patent 9281227 was granted and assigned to Axcelis Technologies on March, 2016 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	9281227	March 8, 2016
‌ US Patent 8932430 RF coupled plasma abatement system comprising an integrated power oscillator	Patent 8932430 was granted and assigned to Axcelis Technologies on January, 2015 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	8932430	January 13, 2015
‌ US Patent 7352554 Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp	Patent 7352554 was granted and assigned to Axcelis Technologies on April, 2008 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7352554	April 1, 2008
‌ US Patent 7267520 Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights	Patent 7267520 was granted and assigned to Axcelis Technologies on September, 2007 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7267520	September 11, 2007
‌ US Patent 11170967 Liquid metal ion source	Patent 11170967 was granted and assigned to Axcelis Technologies on November, 2021 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	11170967	November 9, 2021
‌ US Patent 7507977 System and method of ion beam control in response to a beam glitch	Patent 7507977 was granted and assigned to Axcelis Technologies on March, 2009 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7507977	March 24, 2009
‌ US Patent 7100759 Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit	Patent 7100759 was granted and assigned to Axcelis Technologies on September, 2006 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7100759	September 5, 2006
‌ US Patent 7375355 Ribbon beam ion implanter cluster tool	Patent 7375355 was granted and assigned to Axcelis Technologies on May, 2008 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7375355	May 20, 2008
‌ US Patent 7321299 Workpiece handling alignment system	Patent 7321299 was granted and assigned to Axcelis Technologies on January, 2008 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7321299	January 22, 2008
‌ US Patent 7435977 Ion beam angle measurement systems and methods for ion implantation systems	Patent 7435977 was granted and assigned to Axcelis Technologies on October, 2008 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7435977	October 14, 2008
‌ US Patent 11276543 Hydrogen generator for an ion implanter	Patent 11276543 was granted and assigned to Axcelis Technologies on March, 2022 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	11276543	March 15, 2022
‌ US Patent 7010388 Work-piece treatment system having load lock and buffer	Patent 7010388 was granted and assigned to Axcelis Technologies on March, 2006 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7010388	March 7, 2006
‌ US Patent 7748344 Segmented resonant antenna for radio frequency inductively coupled plasmas	Patent 7748344 was granted and assigned to Axcelis Technologies on July, 2010 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7748344	July 6, 2010
‌ US Patent 10041789 Integrated emissivity sensor alignment characterization	Patent 10041789 was granted and assigned to Axcelis Technologies on August, 2018 by the United States Patent and Trademark Office.	Axcelis Technologies	Axcelis Technologies	United States Patent and Trademark Office	10041789	August 7, 2018
‌ US Patent 7105840 Ion source for use in an ion implanter	Patent 7105840 was granted and assigned to Axcelis Technologies on September, 2006 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7105840	September 12, 2006
‌ US Patent 7205231 Method for in-situ uniformity optimization in a rapid thermal processing system	Patent 7205231 was granted and assigned to Axcelis Technologies on April, 2007 by the United States Patent and Trademark Office.		Axcelis Technologies	United States Patent and Trademark Office	7205231	April 17, 2007

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