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List of Varian Semiconductor Equipment Associates patents

Patents where

Current Assignee

Name

Varian Semiconductor Equipment Associates

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 11442207 System and method for forming diffracted optical element having varied gratings		Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	11442207	September 13, 2022
‌ US Patent 7126808 Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping	Patent 7126808 was granted and assigned to Varian Semiconductor Equipment Associates on October, 2006 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7126808	October 24, 2006
‌ US Patent 8129695 System and method for controlling deflection of a charged particle beam within a graded electrostatic lens	Patent 8129695 was granted and assigned to Varian Semiconductor Equipment Associates on March, 2012 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	8129695	March 6, 2012
‌ US Patent 8926850 Plasma processing with enhanced charge neutralization and process control	Patent 8926850 was granted and assigned to Varian Semiconductor Equipment Associates on January, 2015 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	8926850	January 6, 2015
‌ US Patent 11574800 Extreme edge uniformity control	Patent 11574800 was granted and assigned to Varian Semiconductor Equipment Associates on February, 2023 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	11574800	February 7, 2023
‌ US Patent 7132672 Faraday dose and uniformity monitor for plasma based ion implantation	Patent 7132672 was granted and assigned to Varian Semiconductor Equipment Associates on November, 2006 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7132672	November 7, 2006
‌ US Patent 11424112 Transparent halo assembly for reduced particle generation		Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	11424112	August 23, 2022
‌ US Patent 7361913 Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control	Patent 7361913 was granted and assigned to Varian Semiconductor Equipment Associates on April, 2008 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7361913	April 22, 2008
‌ US Patent 10504682 Conductive beam optic containing internal heating element	Patent 10504682 was granted and assigned to Varian Semiconductor Equipment Associates on December, 2019 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	10504682	December 10, 2019
‌ US Patent 7394079 Architecture for ribbon ion beam ion implanter system	Patent 7394079 was granted and assigned to Varian Semiconductor Equipment Associates on July, 2008 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7394079	July 1, 2008
‌ US Patent 9706634 Apparatus and techniques to treat substrates using directional plasma and reactive gas	Patent 9706634 was granted and assigned to Varian Semiconductor Equipment Associates on July, 2017 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	9706634	July 11, 2017
‌ US Patent RE40008 Method and apparatus for controlling ion implantation during vacuum fluctuation	Patent RE40008 was granted and assigned to Varian Semiconductor Equipment Associates on January, 2008 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	RE40008	January 22, 2008
‌ US Patent 7351984 Controlling the characteristics of implanter ion-beams	Patent 7351984 was granted and assigned to Varian Semiconductor Equipment Associates on April, 2008 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7351984	April 1, 2008
‌ US Patent 9728430 Electrostatic chuck with LED heating	Patent 9728430 was granted and assigned to Varian Semiconductor Equipment Associates on August, 2017 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	9728430	August 8, 2017
‌ US Patent 11402649 System and method for optimally forming gratings of diffracted optical elements		Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	11402649	August 2, 2022
‌ US Patent 7396746 Methods for stable and repeatable ion implantation	Patent 7396746 was granted and assigned to Varian Semiconductor Equipment Associates on July, 2008 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7396746	July 8, 2008
‌ US Patent 9514912 Control of ion angular distribution of ion beams with hidden deflection electrode	Patent 9514912 was granted and assigned to Varian Semiconductor Equipment Associates on December, 2016 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	9514912	December 6, 2016
‌ US Patent 9123509 Techniques for plasma processing a substrate	Patent 9123509 was granted and assigned to Varian Semiconductor Equipment Associates on September, 2015 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	9123509	September 1, 2015
‌ US Patent 7476849 Technique for monitoring and controlling a plasma process	Patent 7476849 was granted and assigned to Varian Semiconductor Equipment Associates on January, 2009 by the United States Patent and Trademark Office.		Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	7476849	January 13, 2009
‌ US Patent 9984889 Techniques for manipulating patterned features using ions	Patent 9984889 was granted and assigned to Varian Semiconductor Equipment Associates on May, 2018 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	9984889	May 29, 2018
‌ US Patent 10192727 Electrodynamic mass analysis	Patent 10192727 was granted and assigned to Varian Semiconductor Equipment Associates on January, 2019 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	10192727	January 29, 2019
‌ US Patent 11488823 Techniques to engineer nanoscale patterned features using ions	Patent 11488823 was granted and assigned to Varian Semiconductor Equipment Associates on November, 2022 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	11488823	November 1, 2022
‌ US Patent 10008384 Techniques to engineer nanoscale patterned features using ions	Patent 10008384 was granted and assigned to Varian Semiconductor Equipment Associates on June, 2018 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	10008384	June 26, 2018
‌ US Patent 10141161 Angle control for radicals and reactive neutral ion beams	Patent 10141161 was granted and assigned to Varian Semiconductor Equipment Associates on November, 2018 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	10141161	November 27, 2018
‌ US Patent 11532483 Spacer sculpting for forming semiconductor devices	Patent 11532483 was granted and assigned to Varian Semiconductor Equipment Associates on December, 2022 by the United States Patent and Trademark Office.	Varian Semiconductor Equipment Associates	Varian Semiconductor Equipment Associates	United States Patent and Trademark Office	11532483	December 20, 2022

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