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List of Tokyo Electron patents

Patents where

Current Assignee

Name

Tokyo Electron

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 8476165 Method for thinning a bonding wafer	Patent 8476165 was granted and assigned to Tokyo Electron on July, 2013 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	8476165	July 2, 2013
‌ US Patent 11274372 Film deposition apparatus	Patent 11274372 was granted and assigned to Tokyo Electron on March, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11274372	March 15, 2022
‌ US Patent 11446714 Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method	Patent 11446714 was granted and assigned to Tokyo Electron on September, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11446714	September 20, 2022
‌ US Patent 11385280 Inspection apparatus and temperature control meihod	Patent 11385280 was granted and assigned to Tokyo Electron on July, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11385280	July 12, 2022
‌ US Patent 11550985 Method for automated standard cell design		Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11550985	January 10, 2023
‌ US Patent 11752515 Coating apparatus and coating method	Patent 11752515 was granted and assigned to Tokyo Electron on September, 2023 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11752515	September 12, 2023
‌ US Patent 10354873 Organic mandrel protection process	Patent 10354873 was granted and assigned to Tokyo Electron on July, 2019 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	10354873	July 16, 2019
‌ US Patent 6962664 Controlled method for segmented electrode apparatus and method for plasma processing	Patent 6962664 was granted and assigned to Tokyo Electron on November, 2005 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	6962664	November 8, 2005
‌ US Patent 8968512 Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism	Patent 8968512 was granted and assigned to Tokyo Electron on March, 2015 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	8968512	March 3, 2015
‌ US Patent 11499993 Stage and inspection apparatus for inspecting electronic device	Patent 11499993 was granted and assigned to Tokyo Electron on November, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11499993	November 15, 2022
‌ US Patent 7706907 Substrate processing apparatus, substrate processing method, computer program, and storage medium	Patent 7706907 was granted and assigned to Tokyo Electron on April, 2010 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	7706907	April 27, 2010
‌ US Patent 7208411 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module	Patent 7208411 was granted and assigned to Tokyo Electron on April, 2007 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	7208411	April 24, 2007
‌ US Patent 6863020 Segmented electrode apparatus for plasma processing	Patent 6863020 was granted and assigned to Tokyo Electron on March, 2005 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	6863020	March 8, 2005
‌ US Patent 8078552 Autonomous adaptive system and method for improving semiconductor manufacturing quality	Patent 8078552 was granted and assigned to Tokyo Electron on December, 2011 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	8078552	December 13, 2011
‌ US Patent 7510884 Semiconductor production system and semiconductor production process	Patent 7510884 was granted and assigned to Tokyo Electron on March, 2009 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	7510884	March 31, 2009
‌ US Patent 11578407 Film-forming apparatus and film-forming method	Patent 11578407 was granted and assigned to Tokyo Electron on February, 2023 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11578407	February 14, 2023
‌ US Patent 8255082 Method for teaching carrier means, storage medium and substrate processing apparatus	Patent 8255082 was granted and assigned to Tokyo Electron on August, 2012 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	8255082	August 28, 2012
‌ US Patent 7426900 Integrated electrostatic inductive coupling for plasma processing	Patent 7426900 was granted and assigned to Tokyo Electron on September, 2008 by the United States Patent and Trademark Office.		Tokyo Electron	United States Patent and Trademark Office	7426900	September 23, 2008
‌ US Patent 11309168 Vacuum processing apparatus and maintenance apparatus		Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11309168	April 19, 2022
‌ US Patent 12123778 Thermal imaging sensor for integration into track system	Patent 12123778 was granted and assigned to Tokyo Electron on October, 2024 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	12123778	October 22, 2024
‌ US Patent 11572623 Substrate processing apparatus		Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11572623	February 7, 2023
‌ US Patent 11322401 Reverse contact and silicide process for three-dimensional semiconductor devices	Patent 11322401 was granted and assigned to Tokyo Electron on May, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11322401	May 3, 2022
‌ US Patent 11526088 Coaxial see-through alignment imaging system	Patent 11526088 was granted and assigned to Tokyo Electron on December, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11526088	December 13, 2022
‌ US Patent 11293814 Temperature measurement member, inspection apparatus, and temperature measurement method		Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11293814	April 5, 2022
‌ US Patent 11342339 Method of making six transistor SRAM cell using connections between 3D transistor stacks	Patent 11342339 was granted and assigned to Tokyo Electron on May, 2022 by the United States Patent and Trademark Office.	Tokyo Electron	Tokyo Electron	United States Patent and Trademark Office	11342339	May 24, 2022

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