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List of ONTO INNOVATION INC. patents

Patents where

Current Assignee

Name

ONTO INNOVATION INC.

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 11346768 Vortex polarimeter	Patent 11346768 was granted and assigned to ONTO INNOVATION INC. on May, 2022 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11346768	May 31, 2022
‌ US Patent 11353316 Interferometry with pixelated color discriminating elements combined with pixelated polarization masks	Patent 11353316 was granted and assigned to ONTO INNOVATION INC. on June, 2022 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11353316	June 7, 2022
‌ US Patent 11280381 Active damper for semiconductor metrology and inspection systems	Patent 11280381 was granted and assigned to ONTO INNOVATION INC. on March, 2022 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11280381	March 22, 2022
‌ US Patent 10557803 Surface height determination of transparent film	Patent 10557803 was granted and assigned to ONTO INNOVATION INC. on February, 2020 by the United States Patent and Trademark Office.	‌ Nanometrics	ONTO INNOVATION INC.	United States Patent and Trademark Office	10557803	February 11, 2020
‌ US Patent 10901241 Optical metrology system using infrared wavelengths	Patent 10901241 was granted and assigned to ONTO INNOVATION INC. on January, 2021 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10901241	January 26, 2021
‌ US Patent 11346790 Focus system for oblique optical metrology device		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11346790	May 31, 2022
‌ US Patent 11346769 Fast generalized multi-wavelength ellipsometer		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11346769	May 31, 2022
‌ US Patent 10935501 Sub-resolution defect detection	Patent 10935501 was granted and assigned to ONTO INNOVATION INC. on March, 2021 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10935501	March 2, 2021
‌ US Patent 11385167 Beamsplitter based ellipsometer focusing system		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11385167	July 12, 2022
‌ US Patent 11531279 System and method for optimizing a lithography exposure process		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11531279	December 20, 2022
‌ US Patent 11353800 Conformal stage	Patent 11353800 was granted and assigned to ONTO INNOVATION INC. on June, 2022 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11353800	June 7, 2022
‌ US Patent 11315832 Wafer singulation process control	Patent 11315832 was granted and assigned to ONTO INNOVATION INC. on April, 2022 by the United States Patent and Trademark Office.	‌ Rudolph Technologies, Inc.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11315832	April 26, 2022
‌ US Patent 11126096 System and method for optimizing a lithography exposure process	Patent 11126096 was granted and assigned to ONTO INNOVATION INC. on September, 2021 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11126096	September 21, 2021
‌ US Patent 11262191 On-axis dynamic interferometer and optical imaging systems employing the same	Patent 11262191 was granted and assigned to ONTO INNOVATION INC. on March, 2022 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11262191	March 1, 2022
‌ US Patent 10914916 Non-adhesive mounting assembly for a tall Rochon polarizer	Patent 10914916 was granted and assigned to ONTO INNOVATION INC. on February, 2021 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10914916	February 9, 2021
‌ US Patent 10775149 Light source failure identification in an optical metrology device	Patent 10775149 was granted and assigned to ONTO INNOVATION INC. on September, 2020 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10775149	September 15, 2020
‌ US Patent 10784136 FOUP purge shield	Patent 10784136 was granted and assigned to ONTO INNOVATION INC. on September, 2020 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10784136	September 22, 2020
‌ US Patent 10830709 Interferometer with pixelated phase shift mask	Patent 10830709 was granted and assigned to ONTO INNOVATION INC. on November, 2020 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10830709	November 10, 2020
‌ US Patent 10746530 Optical metrology device for measuring samples having thin or thick films		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10746530	August 18, 2020
‌ US Patent 11162897 Optical metrology device using numerical aperture reduction	Patent 11162897 was granted and assigned to ONTO INNOVATION INC. on November, 2021 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11162897	November 2, 2021
‌ US Patent 10621264 Correction of angular error of plane-of-incidence azimuth of optical metrology device		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10621264	April 14, 2020
‌ US Patent 10937705 Sample inspection using topography	Patent 10937705 was granted and assigned to ONTO INNOVATION INC. on March, 2021 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	10937705	March 2, 2021
‌ US Patent 11687010 System and method for correcting overlay errors in a lithographic process		ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11687010	June 27, 2023
‌ US Patent 11874229 Apparatus and method for multiple source excitation Raman spectroscopy	Patent 11874229 was granted and assigned to ONTO INNOVATION INC. on January, 2024 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11874229	January 16, 2024
‌ US Patent 11988641 Characterization of patterned structures using acoustic metrology	Patent 11988641 was granted and assigned to ONTO INNOVATION INC. on May, 2024 by the United States Patent and Trademark Office.	ONTO INNOVATION INC.	ONTO INNOVATION INC.	United States Patent and Trademark Office	11988641	May 21, 2024

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